Pfeiffer Vacuum HiPace 300C, inlet flange DN 100 CF-F, exhaust flange DN16 ISO-KF/G-1/4" with TC400, PMP03996
HiPace stands for a complete line of compact yet powerful turbopumps featuring pumping speeds that range from 10 – 2,000 liters per second. These models afford cost-effective yet flexible installation in any orientation. The proven bearing system affords unrivaled dependability. And their sophisticated rotor design makes for higher pumping speeds, higher backing pump compatibility and higher gas throughputs, as well as very good compression for light gases. - Rugged, powerful turbopump with a pumping speed of up to 245 l/s for N2
- Integrated TC 400 drive electronics, DN 100 ISO-F flange
- Ideal for coating and semiconductor applications
- With integrated water cooling for maximum gas throughput
- Flexible through the ability to employ up to 4 accessories
- Ideal for fast cycles
- Extensive accessories expand the range of applications
- Corrosive gas version
Technical data: | Bearing | Hybrid | | Compression ratio for Ar | > 1 · 107 | | Compression ratio for CF4 | > 1 · 107 | | Compression ratio for H2 | 3 · 102 | | Compression ratio for He | 2.2 · 103 | | Compression ratio for N2 | > 1 · 106 | | Cooling method, optional | Air | | Cooling method, standard | Water | | Cooling water consumption | 50 l/h | | Cooling water temperature | 15-35 °C | | Corrosive gas version | yes | | Electronic drive unit | with TC 400 | | Flange (in) | DN 100 CF-F | | Flange (out) | DN 16 ISO-KF | | Fore vacuum max. for N2 | 1 mbar | | Gas throughput at full rotational speed for Ar | 4.4 mbar l/s | | Gas throughput at full rotational speed for CF4 | 5.4 mbar l/s | | Gas throughput at full rotational speed for H2 | > 50 mbar l/s | | Gas throughput at full rotational speed for He | > 20 mbar l/s | | Gas throughput at full rotational speed for N2 | 17 mbar l/s | | Integrated power supply | no | | Interface, extended | no | | Interfaces | RS-485, Remote | | Low vibrations | no | | Mounting orientation | Standard (0°-90°) | | Operating voltage | 24 (± 5 %) V DC | | Particulate matter | yes | | Permissible magnetic field max. | 5.5 mT | | Protection category | IP 54 | | Pumping speed for Ar | 250 l/s | | Pumping speed for CF4 | 195 l/s | | Pumping speed for H2 | 125 l/s | | Pumping speed for He | 220 l/s | | Pumping speed for N2 | 245 l/s | | Rotation speed ± 2 % | 60000 rpm | | Run-up time | 1.2 min | | Separat electronic drive unit | no | | Sound pressure level | ≤ 50 dB (A) | | Ultimate pressure with OnTool™ DryPump | < 1 · 10-8 mbar | | Venting connection | G 1/8" | | Weight | 8.4 kg |
PN06574
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