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|
 |
| Characteristics: |
Pumping speed: for N2 6 l/s, Ultimate pressure with rotary vane pump < 5ยท10-10 mbar, Ultimate pressure with diaphragm pump < 1ท10-5 mbar,
The world's smallest series-production turbopump
A powerful, rugged turbopump with a pumping speed of up to 10 l/s for N2
DN 25 connection
Integrated drive electronics with 24 V supply voltage
Mobile
Requires no additional cooling
|
| Flanges: |
DN 25 KF
|
| Areas of Applications: |
- Analytical
- Leak detection
- Vacuum process technology
- Research, Development and Scientific
- Particle accelerators
- Electron-beam welding
- Solar Energy
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 67 l/s, Ultimate pressure with rotary vane pump < 1ท10-8 mbar, Ultimate pressure with diaphragm pump < 1ท10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| Flanges: |
Flange (in): DN 63 ISO-K
Flange (out): DN 16 ISO-KF
|
| Areas of Applications: |
- Analytical
- Leak detection
- Vacuum process technology
- Research, Development and Scientific
- Particle accelerators
- Electron-beam welding
- Solar Energy
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 67 l/s, Ultimate pressure with rotary vane pump < 110-8 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| Flanges: |
Flange (in): DN 63 CF
Flange (out): DN 16 ISO-KF
|
| Areas of Applications: |
- Analytical
- Leak detection
- Vacuum process technology
- Research, Development and Scientific
- Particle accelerators
- Electron-beam welding
- Solar Energy
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 67 l/s, Ultimate pressure with rotary vane pump < 110-8 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| Flanges: |
Flange (in): DN 40-KF
Flange (out): DN 16 ISO-KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 260 l/s,
Pumping speed: for H2 220 l/s,
Pumping speed: for HE 255 l/s
Ultimate pressure with rotary vane pump < 110-9 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| Flanges: |
Flange (in): DN 100-ISO-K
Flange (out): DN 25-KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 260 l/s,
Pumping speed: for H2 220 l/s,
Pumping speed: for HE 255 l/s,
Ultimate pressure with rotary vane pump < 110-9 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| Flanges: |
Flange (in): DN 100-CF
Flange (out): DN 25 -KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 260 l/s,
Pumping speed: for H2 220 l/s,
Pumping speed: for HE 255 l/s,
Ultimate pressure with rotary vane pump < 110-9 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| Flanges: |
Flange (in): DN 100-ISO-F
Flange (out): DN 25-KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 355 l/s,
Pumping speed: for H2 445 l/s,
Pumping speed: for He 470 l/s,
Ultimate pressure with rotary vane pump < 110-9 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Flange (in): DN 100-ISO-K
Flange (out): DN 25 -KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 355 l/s,
Pumping speed: for H2 445 l/s,
Pumping speed: for He 470 l/s,
Ultimate pressure with rotary vane pump < 110-9 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Flange (in): DN 100-CF-F
Flange (out): DN 25 -KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 355 l/s,
Pumping speed: for H2 445 l/s,
Pumping speed: for He 470 l/s,
Ultimate pressure with rotary vane pump < 110-9 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Flange (in): DN 100-ISO-F
Flange (out): DN 25 -KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 685 l/s,
Pumping speed: for H2 555 l/s,
Pumping speed: for He 655 l/s,
Compression ratio for Ar >1.10-11
Compression ratio for N2 >1.10-11
Ultimate pressure with rotary vane pump < 110-9 mbar, Ultimate pressure with diaphragm pump < 110-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 160-ISO-K Ordering Part # PM P03 933
Flange: DN 160-ISO-F Ordering Part # PM P03 935
Flange: DN 160-CF-F Ordering Part # PM P03 933
|
| Flanges: |
Available Exhaust Flanges:
Flange: DN 25 KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 1250 l/s,
Pumping speed: for H2 1100 l/s,
Pumping speed: for He 1300 l/s,
Compression ratio for Ar >1.10-8
Compression ratio for N2 >1.10-8
Ultimate pressure with rotary vane pump < 1.10-9 mbar, Ultimate pressure with OnTool Dry pump < 1.10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 200-ISO-K, Ordering Part # PM P03 910
Flange: DN 200-ISO-F, Ordering Part # PM P03 911
Flange: DN 200-CF-F, Ordering Part # PM P03 912
|
| Flanges: |
Available Exhaust Flanges:
Flange: DN 40-ISO-KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 1450 l/s,
Pumping speed: for H2 1150 l/s,
Pumping speed: for He 1350 l/s,
Compression ratio for Ar >1.10-8
Compression ratio for N2 >1.10-8
Ultimate pressure with rotary vane pump < 1.10-9 mbar, Ultimate pressure with OnTool Dry pump < 1.10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 250-ISO-K, Ordering Part # PM P04 060
Flange: DN 250-ISO-F, Ordering Part # PM P04 061
Flange: DN 250-CF-F, Ordering Part # PM P04 062
|
| Flanges: |
Avaialble Exhaust Flange:
DN 40 ISO-KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 1450 l/s,
Pumping speed: for H2 1700 l/s,
Pumping speed: for He 1650 l/s,
Compression ratio for Ar >1.10-8
Compression ratio for N2 >1.10-8
Ultimate pressure with rotary vane pump < 1.10-9 mbar, Ultimate pressure with OnTool Dry pump < 1.10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 200-ISO-K, Ordering Part # PM P04 070
Flange: DN 200-CF-F, Ordering Part # PM P04 071
|
| Flanges: |
Available Outlet Flanges:
Flange: DN 40-ISO-KF
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
Alcatel MDP5011 Molecular Turbo Pump
Inlet Flange: ISO63
Pumping Speed L/S:
* Nitrogen: 7.5
* Helium: 4
* Hydrogen: 3
Compression Ratio
* 10/9
* 10/4
* 10/3
Ultimate Pressure (mbar): 10-6
Startup Time (min): 1
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 20
Outlet Flange: NW16
Weight (lb): 7
|
|
|
|
|
|
| Characteristics: |
Pumping speed: for N2 1900 l/s,
Pumping speed: for H2 1850 l/s,
Pumping speed: for He 2050 l/s,
Compression ratio for Ar >1.10-8
Compression ratio for N2 >1.10-8
Ultimate pressure with rotary vane pump < 1.10-9 mbar, Ultimate pressure with OnTool Dry pump < 1.10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research
|
| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 250-ISO-K, Ordering Part # PM P03 920
Flange: DN 250-ISO-F, Ordering Part # PM P03 921
Flange: DN 200-CF-F, Ordering Part # PM P03 922
|
| Flanges: |
Available Outlet Flanges:
Flange: DN 40-ISO-KF,
|
| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
|
|
|
|
|
|
| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
|
|
|
|
|
|
| Characteristics: |
VWith more than 50 years of experience in vacuum science, Varian, Inc. leads the way in developing unique design solutions. Many of these innovations are present in Varian's Turbo-V turbomolecular pumps:
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
|
|
|
|
|
|
| Characteristics: |
VWith more than 50 years of experience in vacuum science, Varian, Inc. leads the way in developing unique design solutions. Many of these innovations are present in Varian's Turbo-V turbomolecular pumps:
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
|
|
|
|
|
|
| Characteristics: |
VWith more than 50 years of experience in vacuum science, Varian, Inc. leads the way in developing unique design solutions. Many of these innovations are present in Varian's Turbo-V turbomolecular pumps:
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
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| Characteristics: |
VWith more than 50 years of experience in vacuum science, Varian, Inc. leads the way in developing unique design solutions. Many of these innovations are present in Varian's Turbo-V turbomolecular pumps:
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
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| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
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| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
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| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
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| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly.
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| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly.
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| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly.
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| Characteristics: |
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly.
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| Characteristics: |
igh speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly.
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| Characteristics: |
igh speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorrฎ Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
* maximize the throughput of the pump
* work with foreline pressures as high as 18 mbar
* increase the compression ratio by decades, most notably for light gases
* keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
* The rotor is stronger.
* Rotor weight is minimized.
* Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly.
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| Characteristics: |
The Turbo-V 2K-G System
* The first application -specific pumping solution for thin-film deposition equipment
* The highest-performing, most compact unit available
* The first fully integrated approach for maximum system productivity and uptime
* The integrated package the turbomolecular pump, drive electronics, power supply, MoniTorr, purge gas fittings, and electronic communication
* The versatile electronics interface with easy-to-use software
* Analog I/O signals and RS-232/RS-485 interfaces are standard
* Varian Profibusฎ interface is optional.
Pumping speed for nitrogen: 1600 l/s
Compression ratio for nitrogen: 3 ื 105
Base pressure with recommended forepump: <1 ื 10-8 mbar
Inlet flange: ISO 250 F
Foreline flange: NW40 KF
Nominal rotational speed: 33,000 rpm
Start-up time: <7 minutes
Recommended forepump: >40 mณ/h
Operating position: Any
Power supply: 100-240 V, 50-60 Hz
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| Characteristics: |
The Varian, Inc. Turbo-V 3K-T turbomolecular pump is a versatile, high-performance 2000 l/s system that is designed for scientific and research applications as well as industrial production environments.
The Turbo-V 3K-T is a complete vacuum pumping system in one compact package, with innovative features such as control circuitry on board and intelligent MoniTorr technology. Varian, Inc. is the only manufacturer that offers turbo pumps with fully integrated electronics in combination with a maintenance-free dry lubricaton system.
The optimized design of the turbine guarantees high performance, even in applications with high gas loads or high levels of light gases, as well as UHV applications demanding high compression.
The sophisticated integrated electronics permit these special features:
* T-plus software interface to a computer
* PROFIBUSฎ communication interface
* Automatic temperature control
* Stop-speed reading function for monitoring slow-down after a stop command
* MoniTorr remote diagnostics
* Available integrated purge/vent device
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ATP80 CF63:
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Alcatel ATP80 CF63 Molecular Turbo Pump
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| Characteristics: |
Alcatel ATP80 Molecular Turbo Pump
Inlet Flange: CF63
Pumping Speed L/S:
* Nitrogen: 80
* Helium: 50
* Hydrogen: 40
Compression Ratio
* 8 x 10/7
* 2500
* 300
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 2x10-1
Outlet Flange: NW25
Weight (lb): 10
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| Characteristics: |
Alcatel ATP80 Molecular Turbo Pump
Inlet Flange: ISO63
Pumping Speed L/S:
* Nitrogen: 80
* Helium: 50
* Hydrogen: 40
Compression Ratio
* 8 x 10/7
* 2500
* 300
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 2x10-1
Outlet Flange: NW25
Weight (lb): 10
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| Characteristics: |
Alcatel ATP100 Molecular Turbo Pump
Inlet Flange: CF100
Pumping Speed L/S:
* Nitrogen: 100
* Helium: 60
* Hydrogen: 40
Compression Ratio
* 8 x 10/7
* 2500
* 300
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 3x10-1
Outlet Flange: NW25
Weight (lb): 12
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| Characteristics: |
Alcatel ATP100 Molecular Turbo Pump
Inlet Flange: ISO100
Pumping Speed L/S:
* Nitrogen: 100
* Helium: 60
* Hydrogen: 40
Compression Ratio
* 8 x 10/7
* 2500
* 300
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 3x10-1
Outlet Flange: NW25
Weight (lb): 12
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| Characteristics: |
Alcatel ATP150 Molecular Turbo Pump
Inlet Flange: CF100
Pumping Speed L/S:
* Nitrogen: 140
* Helium: 100
* Hydrogen: 80
Compression Ratio
* 7 x 10/8
* 1.2 x 10/4
* 1 x 10/3
Ultimate Pressure (mbar): 10-10
Startup Time (min): 2
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 4x10-1
Outlet Flange: NW25
Weight (lb): 14
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| Characteristics: |
Alcatel ATP150 Molecular Turbo Pump
Inlet Flange: ISO100
Pumping Speed L/S:
* Nitrogen: 140
* Helium: 100
* Hydrogen: 80
Compression Ratio
* 7 x 10/8
* 1.2 x 10/4
* 1 x 10/3
Ultimate Pressure (mbar): 10-10
Startup Time (min): 2
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 4x10-1
Outlet Flange: NW25
Weight (lb): 14
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| Characteristics: |
Alcatel ATP400 Molecular Turbo Pump
Inlet Flange: CF160
Pumping Speed L/S:
* Nitrogen: 400
* Helium: 300
* Hydrogen: 250
Compression Ratio
* 7 x 10/8
* 1.5 x 10/4
* 1 x 10/3
Ultimate Pressure (mbar): 10-10
Startup Time (min): 3
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 2x10-1
Outlet Flange: NW40
Weight (lb): 20
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| Characteristics: |
Alcatel ATP400 Molecular Turbo Pump
Inlet Flange: ISO160
Pumping Speed L/S:
* Nitrogen: 400
* Helium: 300
* Hydrogen: 250
Compression Ratio
* 7 x 10/8
* 1.5 x 10/4
* 1 x 10/3
Ultimate Pressure (mbar): 10-10
Startup Time (min): 3
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 2x10-1
Outlet Flange: NW40
Weight (lb): 20
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| Characteristics: |
Alcatel ATP900 Molecular Turbo Pump
Inlet Flange: CF200
Pumping Speed L/S:
* Nitrogen: 900
* Helium: 540
* Hydrogen: 300
Compression Ratio
* 7 x 10/8
* 1.5 x 10/4
* 1 x 10/3
Ultimate Pressure (mbar): 10-10
Startup Time (min): 3
Rotational Speed (rpm): 27000
Orientation: Any
Backing Pressure (mbar): 2x10-1
Outlet Flange: NW40
Weight (lb): 40
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| Characteristics: |
Edwards EXT70 Turbo Pump
Inlet Flange: CF63
Pumping Speed L/S:
* Nitrogen: 65
* Helium: 60
* Hydrogen: 50
Compression Ratio
* 1 x 10/7
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < 0.1
Outlet Flange: NW16
Weight (lb): 6
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| Characteristics: |
Edwards EXT70 Turbo Pump
Inlet Flange: ISO63
Pumping Speed L/S:
* Nitrogen: 65
* Helium: 60
* Hydrogen: 50
Compression Ratio
* 1 x 10/7
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < 0.1
Outlet Flange: NW16
Weight (lb): 6
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| Characteristics: |
Edwards EXT70 Turbo Pump
Inlet Flange: NW40
Pumping Speed L/S:
* Nitrogen: 65
* Helium: 60
* Hydrogen: 50
Compression Ratio
* 1 x 10/7
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < 0.1
Outlet Flange: NW16
Weight (lb): 6
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| Characteristics: |
Edwards EXT70H Turbo Pump
Inlet Flange: CF63
Pumping Speed L/S:
* Nitrogen: 65
* Helium: 60
* Hydrogen: 50
Compression Ratio
* 1 x 10/8
* 4 x 10/5
* 3 x 10/4
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < 5
Outlet Flange: NW16
Weight (lb): 4
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| Characteristics: |
Edwards EXT70H Turbo Pump
Inlet Flange: ISO63
Pumping Speed L/S:
* Nitrogen: 65
* Helium: 60
* Hydrogen: 50
Compression Ratio
* 1 x 10/8
* 4 x 10/5
* 3 x 10/4
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < 5
Outlet Flange: NW16
Weight (lb): 4
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| Characteristics: |
Edwards EXT70H Turbo Pump
Inlet Flange: NW40
Pumping Speed L/S:
* Nitrogen: 65
* Helium: 60
* Hydrogen: 50
Compression Ratio
* 1 x 10/8
* 4 x 10/5
* 3 x 10/4
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < 5
Outlet Flange: NW16
Weight (lb): 4
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| Characteristics: |
Edwards EXT75DX Turbo Pump
Inlet Flange: CF63
Pumping Speed L/S:
* Nitrogen: 61
* Helium: 57
* Hydrogen: 53
Compression Ratio
* 1 x 10/1
* 1 x 10/6
* 1 x 10/4
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < a5
Outlet Flange: NW16
Weight (lb): 6
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| Characteristics: |
Edwards EXT75DX Turbo Pump
Inlet Flange: ISO63
Pumping Speed L/S:
* Nitrogen: 61
* Helium: 57
* Hydrogen: 53
Compression Ratio
* 1 x 10/1
* 1 x 10/6
* 1 x 10/4
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < a5
Outlet Flange: NW16
Weight (lb): 6
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| Characteristics: |
Edwards EXT75DX Turbo Pump
Inlet Flange: NW40
Pumping Speed L/S:
* Nitrogen: 61
* Helium: 57
* Hydrogen: 53
Compression Ratio
* 1 x 10/1
* 1 x 10/6
* 1 x 10/4
Ultimate Pressure (mbar): 10-9
Startup Time (min): 2
Rotational Speed (rpm): 90000
Orientation: Any
Backing Pressure (mbar): < a5
Outlet Flange: NW16
Weight (lb): 6
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| Characteristics: |
Edwards EXT255H Turbo Pump
Inlet Flange: CF100
Pumping Speed L/S:
* Nitrogen: 220
* Helium: 230
* Hydrogen: 180
Compression Ratio
* 1 x 10/3
* 4 x 10/5
* 1.6 x 10/4
Ultimate Pressure (mbar): 10-10
Startup Time (min): 3
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 5
Outlet Flange: NW25
Weight (lb): 13
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| Characteristics: |
Edwards EXT255H Turbo Pump
Inlet Flange: ISO100
Pumping Speed L/S:
* Nitrogen: 220
* Helium: 230
* Hydrogen: 180
Compression Ratio
* 1 x 10/3
* 4 x 10/5
* 1.6 x 10/4
Ultimate Pressure (mbar): 10-10
Startup Time (min): 3
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 5
Outlet Flange: NW25
Weight (lb): 13
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| Characteristics: |
Edwards EXT255HI Turbo Pump
Inlet Flange: ISO100
Pumping Speed L/S:
* Nitrogen: 220
* Helium: 230
* Hydrogen: 180
Compression Ratio
* 1 x 10/3
* 4 x 10/5
* 1.6 x 10/4
Ultimate Pressure (mbar): 10-10
Startup Time (min): 3
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 5
Out
Weight (lb): 13
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| Characteristics: |
Edwards EXT255DX Turbo Pump
Inlet Flange: CF100
Pumping Speed L/S:
* Nitrogen: 220
* Helium: 230
* Hydrogen: 180
Compression Ratio
* 1 x 10/8
* 4 x 10/5
* 1.6 x 10/4
Ultimate Pressure (mbar): 10-10
Startup Time (min): 3
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 5
Outlet Flange: NW25
Weight (lb): 13
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| Characteristics: |
Edwards EXT255DX Turbo Pump
Inlet Flange: ISO100
Pumping Speed L/S:
* Nitrogen: 220
* Helium: 230
* Hydrogen: 180
Compression Ratio
* 1 x 10/8
* 4 x 10/5
* 1.6 x 10/4
Ultimate Pressure (mbar): 10-10
Startup Time (min): 3
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 5
Outlet Flange: NW25
Weight (lb): 13
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| Characteristics: |
Edwards EXT406PX Turbo Pump
Inlet Flange: CF100
Pumping Speed L/S:
* Nitrogen: 380
* Helium: 400
* Hydrogen: 340
Compression Ratio
* 1 x 10/11
* 2 x 10/6
* 2 x 10/4
Ultimate Pressure (mbar): 10-11
Startup Time (min): 5
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 8
Outlet Flange: NW25
Weight (lb): 14
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| Characteristics: |
Edwards EXT406PX Turbo Pump
Inlet Flange: ISO100
Pumping Speed L/S:
* Nitrogen: 380
* Helium: 400
* Hydrogen: 340
Compression Ratio
* 1 x 10/11
* 2 x 10/6
* 2 x 10/4
Ultimate Pressure (mbar): 10-11
Startup Time (min): 5
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 8
Outlet Flange: NW25
Weight (lb): 14
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| Characteristics: |
Edwards EXT406PX Turbo Pump
Inlet Flange: CF160
Pumping Speed L/S:
* Nitrogen: 380
* Helium: 400
* Hydrogen: 340
Compression Ratio
* 1 x 10/11
* 2 x 10/6
* 2 x 10/4
Ultimate Pressure (mbar): 10-11
Startup Time (min): 5
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 8
Outlet Flange: NW25
Weight (lb): 14
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| Characteristics: |
Edwards EXT406PX Turbo Pump
Inlet Flange: ISO160
Pumping Speed L/S:
* Nitrogen: 380
* Helium: 400
* Hydrogen: 340
Compression Ratio
* 1 x 10/11
* 2 x 10/6
* 2 x 10/4
Ultimate Pressure (mbar): 10-11
Startup Time (min): 5
Rotational Speed (rpm): 60000
Orientation: Any
Backing Pressure (mbar): < 8
Outlet Flange: NW25
Weight (lb): 14
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