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| Characteristics: |
Pumping speed: for N2 1250 l/s,
Pumping speed: for H2 1100 l/s,
Pumping speed: for He 1300 l/s,
Compression ratio for Ar >1.10-8
Compression ratio for N2 >1.10-8
Ultimate pressure with rotary vane pump < 1.10-9 mbar, Ultimate pressure with OnTool Dry pump < 1.10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
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| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 200-ISO-K, Ordering Part # PM P03 916
Flange: DN 200-ISO-F, Ordering Part # PM P03 917
Flange: DN 200-CF-F, Ordering Part # PM P03 918
Upside Down models also available.
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| Flanges: |
Available Outlet Flanges:
Flange: DN 40-ISO-KF,
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| Areas of Applications: |
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
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| Characteristics: |
Pumping speed: for N2 1450 l/s,
Pumping speed: for H2 1150 l/s,
Pumping speed: for He 1350 l/s,
Compression ratio for Ar >1.10-8
Compression ratio for N2 >1.10-8
Ultimate pressure with rotary vane pump < 1.10-9 mbar, Ultimate pressure with OnTool Dry pump < 1.10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
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| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 250-ISO-K, Ordering Part # PM P04 060
Flange: DN 250-ISO-F, Ordering Part # PM P04 061
Flange: DN 250-CF-F, Ordering Part # PM P04 190
Upside Down flange models also available
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| Flanges: |
Available Outlet Flanges:
Flange: DN 40-ISO-KF,
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| Areas of Applications: |
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
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| Characteristics: |
Pumping speed: for N2 1450 l/s,
Pumping speed: for H2 1700 l/s,
Pumping speed: for He 1650 l/s,
Compression ratio for Ar >1.10-8
Compression ratio for N2 >1.10-8
Ultimate pressure with rotary vane pump < 1.10-9 mbar, Ultimate pressure with OnTool Dry pump < 1.10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 200-ISO-K, Ordering Part # PM P04 066
Flange: DN 200-ISO-F, Ordering Part # PM P04 067
Upside Down Flange models also available.
|
| Flanges: |
Available Outlet Flanges:
Flange: DN 40-ISO-KF,
|
| Areas of Applications: |
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
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| Characteristics: |
Pumping speed: for N2 1900 l/s,
Pumping speed: for H2 1850 l/s,
Pumping speed: for He 2050 l/s,
Compression ratio for Ar >1.10-8
Compression ratio for N2 >1.10-8
Ultimate pressure with rotary vane pump < 1.10-9 mbar, Ultimate pressure with OnTool Dry pump < 1.10-7 mbar, High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Turbo drag pump designed for a wide range of applications in industry and research.
|
| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 250-ISO-K, Ordering Part # PM P04 926
Flange: DN 250-ISO-F, Ordering Part # PM P04 927
Flange: DN 250-CF-F, Ordering Part # PM P04 194
Upside Down Flange models also available.
|
| Flanges: |
Available Outlet Flanges:
Flange: DN 40-ISO-KF,
|
| Areas of Applications: |
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
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