ALCATEL EDWARDS LEYBOLD PFEIFFER-BALZERS VARIAN TOYOTA OERLIKON INFICON VACUUBRAND All TMH 1000 MP: TMH 1000 MP, Turbomolecular drag pump DN 200 ISO-K Characteristics: Pumping speed: for N2 990 l/s, Ultimate pressure with rotary vane pump < 5Ë?10-10 mbar, Ultimate pressure with diaphragm pump < 1Ë?10-8 mbar, Gas throughput for N2 20 mbar l/s, Temperature Management System (TMS) no, Venting valve: integrated, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , < 1Ë?10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. Turbopump with high gas throughputs at economical fore-vacuum. Magnetic bearing turbomolecular pumps offers hydrocarbon and maintenance-free operation with unlimited installation orientation. Flanges: Flange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Storage media - Tool coating - Optical coatings - Semiconductor technology - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Glass coating Similar Products: Suitable backing pumps: PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF 200/346V, 50Hz, 220/380V, 60Hz PKT01300 - MVP 055-3, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT10800 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT10801 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz Click to enlarge TMH 1600 MP: TMH 1600 MP, Turbomolecular drag pump DN 250 ISO-K Characteristics: Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 5Ë?10-10 mbar, Ultimate pressure with diaphragm pump < 1Ë?10-8 mbar, Gas throughput for N2 16 mbar l/s, Temperature Management System (TMS): optional, Venting valve : integrated, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , < 1Ë?10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. Turbopump with high gas throughputs at economical fore-vacuum. Magnetic bearing turbomolecular pumps offers hydrocarbon and maintenance-free operation with unlimited installation orientation. Optimized for high compression. Flanges: Flange (in): DN 250 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Storage media - Tool coating - Optical coatings - Process technology - Metallurgy - Semiconductor technology - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Glass coating Similar Products: Suitable backing pumps: PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF 200/346V, 50Hz, 220/380V, 60Hz PKT01300 - MVP 055-3, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT10800 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT10801 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz Click to enlarge TMH 200 MP: TMH 200 MP, Turbomolecular drag pump DN 100 ISO-K Characteristics: Pumping speed: for N2 180 l/s, Ultimate pressure with rotary vane pump < 5Ë?10-10 mbar, Ultimate pressure with diaphragm pump < 1Ë?10-8 mbar, Gas throughput for N2 5 mbar l/s, Temperature Management System (TMS): no, Venting valve: integrated, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , < <10-8. The gas throughput is measured by HV-pressure of 0.1 mbar. Max. gas throughput just with water cooling operation. Cooling water quantity is measured by max. gas throughput. Turbopump with high gas throughputs at economical fore-vacuum. Magnetic bearing turbomolecular pump offer hydrocarbon and maintenance-free operation with unlimited installation orientation. Flanges: Flange (in): DN 100 ISO-K Flange (out): DN 25 ISO-KF Areas of Applications: - Analytical - Electron microscopy - Surface analysis - Semiconductor technology - Defect analysis - Ion implantation - Research, Development and Scientific - Particle accelerators Similar Products: Suitable backing pumps: PKD62707 - DUO 10, Rotary vane pump, 1 phase 100-110 V, 50 Hz, 100-120 V, 60 Hz PKD62712 - DUO 10, Rotary vane pump, 1 phase 200-230 V, 50 Hz, 200-240 V, 60 Hz PKT01300 - MVP 055-3, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT11800 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11801 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz Click to enlarge TMH 400 MP: TMH 400 MP, Turbomolecular drag pump, DN 100 ISO-K Characteristics: Pumping speed: for N2 220 l/s, Ultimate pressure with rotary vane pump < 5Ë?10-10 mbar, Ultimate pressure with diaphragm pump < 1Ë?10-8 mbar, Gas throughput for N2 13 mbar l/s, Temperature Management System (TMS): no, Venting valve: integrated. Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , < <10-8. The gas throughput is measured by HV-pressure of 0.1 mbar. Cooling water quantity is measured by max. gas throughput. Turbopump with high gas throughputs at economical fore-vacuum. Magnetic bearing turbomolecular pumps offer hydrocarbon and maintenance-free operation with unlimited installation orientation. High gas throughput even with small backing pump volume flow rates. Flanges: Flange (in): DN 100 ISO-K Flange (out): DN 25 ISO-KF Areas of Applications: - Analytical - Electron microscopy - Surface analysis - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Research, Development and Scientific - Particle accelerators - Plasma physics Similar Products: Suitable backing pumps: PKD62707 - DUO 10, Rotary vane pump, 1 phase 100-110 V, 50 Hz, 100-120 V, 60 Hz PKD62712 - DUO 10, Rotary vane pump, 1 phase 200-230 V, 50 Hz, 200-240 V, 60 Hz PKT01300 - MVP 055-3, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT11800 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11801 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz Click to enlarge

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