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| Characteristics: |
Pumping speed: for N2 2100 l/s, Ultimate pressure with OnTool DryPumpTM < 1.10-8 mbar, Gas throughput at full rotational speed for N2 50 mbar l/s, Gas throughput at 0.1 mbar HV for N2 45 mbar l/s, Fore Vacuum max. for N2 3 mbar, Sealing gas connection: yes, The gas throughput is measured with 120 m3 (70 cfm) backing pump. Cooling water quantity is measured at max. gas throughput. Pre value - The most powerful, compact and innovative magnetically levitated Turbo pump in the >2000 l/s class. With integrated drive electronics TM 3000 and vent/purge valve. Maintenance free. Highest compression ratio for light gases combined with high Argon gas load due to advanced rotor design for all vacuum applications.
Pumping speed: for N2 2100 l/s,
Pumping speed: for H2 1800 l/s,
Pumping speed: for He 1900 l/s,
Pumping speed: for Ar 1900 l/s,
Compression ratio for Ar >1.10-9
Compression ratio for N2 >1.10-9
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| HV-Flange Top: |
Available Inlet Flanges:
Flange: DN 250-ISO-K, Ordering Part # PM P03 490
Flange: DN 250-ISO-F, Ordering Part # PM P03 491
Flange: DN 250-CF-F, Ordering Part # PM P03 492
Upside Down Flange models also available.
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| Flanges: |
Available Outlet Flanges:
Flange: DN 40-ISO-KF,
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| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
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| Note: |
Note: For reasons of safety and security, the centering ring with multifunctional coating and 30 bracket screws must be employed for attaching the HiPace to the high vacuum flange.
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| Characteristics: |
Pumping speed: for N2 2950 l/s, Ultimate pressure with OnTool DryPumpTM < 1.10-8 mbar, Gas throughput at full rotational speed for N2 50 mbar l/s, Gas throughput at 0.1 mbar HV for N2 45 mbar l/s, Fore Vacuum max. for N2 3 mbar, Sealing gas connection: yes, The gas throughput is measured with 120 m3 (70 cfm) backing pump. Cooling water quantity is measured at max. gas throughput. Pre value - The most powerful, compact and innovative magnetically levitated Turbo pump in the >2000 l/s class. With integrated drive electronics TM 3000 and vent/purge valve. Maintenance free. Highest compression ratio for light gases combined with high Argon gas load due to advanced rotor design for all vacuum applications.
Pumping speed: for N2 2950 l/s,
Pumping speed: for H2 2850 l/s,
Pumping speed: for He 2950 l/s,
Pumping speed: for Ar 2850 l/s,
Compression ratio for Ar >1.10-9
Compression ratio for N2 >1.10-9
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| HV-Flange Top: |
Flange: DN 320-ISO-F, Ordering Part # PM P03 501
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| Flanges: |
Available Outlet Flanges:
Flange: DN 40-ISO-KF,
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| Areas of Applications: |
- Thin film technology
- Tool coating
- Optical coatings
- Process technology
- Metallurgy
- Vacuum industries
- Semiconductor technology
- Sputtering
- Plasma coating
- Vacuum process technology
- Glass coating
- Surface refinement
- Solar cell manufacture
- Research, Development and Scientific
- Fusion technology
- Space simulation chambers
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| Note: |
Note: For reasons of safety and security, the centering ring with multifunctional coating and 30 bracket screws must be employed for attaching the HiPace to the high vacuum flange
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