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Category of products: Edwards Vacuum
- Thread Sealants
- Mounting Kits
- Leak Detectors
- Shipping Crates
- Cooling Water Circulators
- Laboratory Pipette Washers
- Laboratory Stirrers
- Muffle Furnace
- Rotary Evaporators
- Cold Traps
Found 5 products
Item#: PN07413 Mfr Part#: A59000945 Manufacturer: Edwards Vacuum
Price upon request

Edwards iH80 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A59000945

 

Edwards iH80 Overview:


Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.

The iH80 system has an HCDP80 dry pump; The HCDP pump has enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system.

You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.

 

Edwards iH80 Applications:


  • Load Lock
  • Transfer
  • Metrology
  • Lithography
  • PVD Process
  • PVD Pre-clean
  • RTA
  • Strip/Ashing
  • Etching
  • Implant Source
  • HDP CVD
  • RTP
  • SACVD
  • MCVD
  • PECVD
  • LPCVD
  • ALD

Click Here for Edwards iH 80 Manual


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: New
Item#: PN07415 Mfr Part#: ACA102121000 Manufacturer: Edwards Vacuum
PRICE: $31,465.47
WEB SAVINGS: $616.97
YOU PAY: $30,848.50

Edwards iXH 100 Dry Semiconductor Vacuum Pump, 380-460 V, 50/60 Hz, ACA102121000

 

Edwards iXH100 Overview:


Hydrogen is a difficult gas to pump due to its small molecular size and low viscosity. The iXH pumping system uses a series of large capacity pumps and boosters to attain the optimum compression ratio required to pump this gas efficiently. The system is modular and highly configurable, making it easy to meet the site installation and performance requirements for a variety of solar and semiconductor manufacturing processes. The components can be stacked on top of one another to achieve the smallest footprint in the industry. Multiple iXH modules, configured to meet application-specific requirements and managed by a single controller, appear to the operator as an easy-to-use, seamlessly integrated vacuum system.

The iXH series of dry pumps for harsh processes offer greater process capability and reduced cost of ownership (CoO) compared to previous-generation Edwards pumps. Reduced CoO is achieved through a ten percent reduction in energy consumption, longer overhaul intervals and reduced unscheduled downtime. They feature a wide temperature range (which helps minimize by-product accumulation), greatly increased powder-handling capabilities, and unique Gas Buster™ technology, as well as an innovative pump seal technology that helps lengthen process life and reduce leakage risks.

 

Unit is NEW and comes with a FULL 12-MONTH WARRANTY!

 


A&J Vacuum Services offers full repair/service of Pfeiffer Vacuum Pumps, along with all other brands offered on our website. AJVS also services Pfeiffer turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: New
Item#: PN07414 Mfr Part#: A59030945 Manufacturer: Edwards Vacuum
PRICE: $50,530.00
WEB SAVINGS: $4,594.00
YOU PAY: $45,936.00

Edwards iH1000 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A59030945

 

Edwards iH 1000 Overview:


Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

The Edwards iH dry pumps offer a highly reliable, low cost pump for difficult processes where particulate, condensable or corrosive by-products are present. The iH series has a five stage base pump with an innovative cantilever rotor, claw and roots design which improves dust handling and reduces exhaust noise. In addition, iH series pumps are fitted with a single stage mechanical booster pump and totally enclosed water cooled motors.

The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.

The iH600 system has an HCDP80 dry pump, with an HCMB600 mechanical booster pump fitted to the inlet of the HCDP80 pump. Both the HCDP and HCMB pumps have enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system.

You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.

 


Click Here for Edwards iH 1000 Manual


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: New
Item#: PN07416 Mfr Part#: A72601903 Manufacturer: Edwards Vacuum
PRICE: $47,123.27
WEB SAVINGS: $1,187.27
YOU PAY: $45,936.00

Edwards iXH 1210 Dry Semiconductor Vacuum Pump, 380-460 V, 50/60 Hz, A72601903

 

Edwards iXH1210 Overview:


Hydrogen is a difficult gas to pump due to its small molecular size and low viscosity. The iXH pumping system uses a series of large capacity pumps and boosters to attain the optimum compression ratio required to pump this gas efficiently. The system is modular and highly configurable, making it easy to meet the site installation and performance requirements for a variety of solar and semiconductor manufacturing processes. The components can be stacked on top of one another to achieve the smallest footprint in the industry. Multiple iXH modules, configured to meet application-specific requirements and managed by a single controller, appear to the operator as an easy-to-use, seamlessly integrated vacuum system.

The iXH series of dry pumps for harsh processes offer greater process capability and reduced cost of ownership (CoO) compared to previous-generation Edwards pumps. Reduced CoO is achieved through a ten percent reduction in energy consumption, longer overhaul intervals and reduced unscheduled downtime. They feature a wide temperature range (which helps minimize by-product accumulation), greatly increased powder-handling capabilities, and unique Gas Buster™ technology, as well as an innovative pump seal technology that helps lengthen process life and reduce leakage risks.

 

Unit is NEW and comes with a FULL 12-MONTH WARRANTY!

 


A&J Vacuum Services offers full repair/service of Pfeiffer Vacuum Pumps, along with all other brands offered on our website. AJVS also services Pfeiffer turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: New
Item#: PN18233 Mfr Part#: A59020945 Manufacturer: Edwards Vacuum
Price upon request

Edwards iH600 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A53382946

 

Edwards iH 600 Overview:


Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

The Edwards iH dry pumps offer a highly reliable, low cost pump for difficult processes where particulate, condensable or corrosive by-products are present. The iH series has a five stage base pump with an innovative cantilever rotor, claw and roots design which improves dust handling and reduces exhaust noise. In addition, iH series pumps are fitted with a single stage mechanical booster pump and totally enclosed water cooled motors.

The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.

The iH600 system has an HCDP80 dry pump, with an HCMB600 mechanical booster pump fitted to the inlet of the HCDP80 pump. Both the HCDP and HCMB pumps have enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system.

You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.

 


Click Here for Edwards iH 600 Manual


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: New
Contact
A&J Vacuum Services
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Customer Service
Phone: 973-249-0854, Fax: 973-249-0855
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