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Category of products: Refurbished / Demo Industrial Dry Vacuum Pumps
- Thread Sealants
- Mounting Kits
- Leak Detectors
- Shipping Crates
- Cooling Water Circulators
- Laboratory Pipette Washers
- Laboratory Stirrers
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- Rotary Evaporators
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Found 37 products
Item#: PN00253 Mfr Part#: A533-53-945 Manufacturer: Edwards Vacuum
PRICE: $11,293.95
WEB SAVINGS: $3,053.95
YOU PAY: $8,240.00

Edwards Vacuum iL 70 Dry Vacuum Pumping System, 220 V, 50/60 Hz, A53353945

 

Edwards iL 70 Overview:


The iL system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chambers. This ensures a clean pumping system without back-migration of oil into the system being evacuated.

The iL 70 system has an LCDP70 dry pump.

The LCDP70 has enclosed, water-cooled motors. The iL system is therefore suitable for applications in clean environments where fan cooling is unacceptable.

The iL system is designed to operate as a sealed unit, chemicals passing through the pump being contained within the internal volume and separated from the external environment by a mechanical barrier. This barrier is made up of a number of components of different materials, chosen to be resistant to attack by chemicals usually found in clean applications.

 

Edwards iL 70 Dimensions:


Edwards iL 70, A53353945


Click Here for Edwards iL 70 Manual


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: Remanufactured In Stock
Item#: PN00269 Mfr Part#: A53377958 Manufacturer: Edwards Vacuum
PRICE: $9,192.75
WEB SAVINGS: $180.25
YOU PAY: $9,012.50

Edwards Vacuum L70 Dry Vacuum Pump, ISO 63, 41 cfm, 200/230 V, 50/60 Hz, A53377958

 

Edwards L70 Overview:


The Edwards L70 Dry Vacuum Pump is a low cost dry pump specifically designed for clean load-locks and similar applications.

Features:

  • Pumping Speed: 41 cfm
  • Ultimate Pressure: 3.8 x 10-2 torr
  • Inlet Flange: ISO 63
  • Outlet Flange: NW 40

 


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: Remanufactured In Stock
Item#: PN00255 Mfr Part#: A53610958 Manufacturer: Edwards Vacuum
PRICE: $19,500.00
WEB SAVINGS: $2,350.00
YOU PAY: $17,150.00

Edwards Vacuum iGX100L Dry Vacuum Pump, 200-230 V, 50/60 Hz, A53610958

 

Edwards iGX100L Overview:


The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. 
  
iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. 
  
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

 

Lower Utilities Cost:


Typically a 40% saving can be made on utilities cost over an entire fab.  

  • Based on a 300 m fab in the US, containing 200 tools, 537 pumps
  • 70% iGX pumps, 30% iH pumps
  • iGX fitted with constant flow water valve
 

Designed for Energy Efficiency:


  • High performance motors and inverter drives
    • Low operating power consumption
    • Lower power standby mode using Active Utility Control (AUC)
  • Nitrogen dilution can be tuned to the application requirement
    • Minimizes gas usage
  • Highly efficient cooling
    • High conductivity materials and good design enables low water flow
  • Precision ceramic bearings
    • Very high load capability for reliability
    • Low noise and vibration
 

Ethernet Connectivity:


The iGX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as:  

  • Operating status   
  • Key parameters
  • Parameter setpoints
  • Alert summary

 

Edwards iGX100L Dimensions:


Edwards iGX100L Dry Vacuum Pump, A53610958


Click Here for Edwards iGX 100 Manual


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: Remanufactured In Stock
Item#: PN06851 Mfr Part#: A53240880 Manufacturer: Edwards Vacuum
PRICE: $11,850.00
WEB SAVINGS: $2,855.00
YOU PAY: $8,995.00

Edwards iQDP 40 Dry Vacuum Pump, Semiconductor Pump, A53240880

 

Edwards iQDP 40 Overview:


The iQ system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber(s). This ensures a clean pumping system without back-migration of oil into the system being evacuated.

Both the iQDP and QMB pumps have enclosed, water-cooled motors. The iQ system is therefore suitable for applications in clean environments where fan cooling is unacceptable.

The iQ system has a Gas Module which introduces purge gas into the iQDP pump. Three types of Gas Module are available, suitable for light, medium and harsh duty processes.

You can manually control the iQ system through an optional Pump Display Module accessory. Alternatively, you can use your process tool or other control equipment to control the operation of the iQ system through an Interface Module accessory, or you can use the iQSingle Pumpset Monitor accessory to control the operation of the iQ system.

The iQDP pump is a four-stage, positive displacement rotary pump in which pairs of intermeshing rotors (of different profiles mounted on common shafts) are held in correct phase relation by a pair of timing-gears. The timing-gears and the adjacent double-row angular contactball-bearings, are oil lubricated.

The pump has an indirect cooling-system and the pump-motor is water cooled.

The QMB pumps are positive displacement Roots vacuum pumps. The pump mechanism is driven by a three-phase electric motor through a hydrokinetic fluid-coupling. The hydrokinetic fluid-coupling is configured so that when the gas-load is high, the rotational speed of the rotors is reduced. As the gas-load decreases, the rotors accelerate to full speed. This allows continuous operation of the pump over the vacuum range without the risk of overloading the motor and removes the need for bypass-valves and associated pipelines.

 

Edwards iQDP 40 Dimensions:


Edwards iQDP 40 Dry Vacuum Pump With QMB 250 Vacuum Booster, Semiconductor Pumping System, AS3280905


Click Here for Edwards iQDP 40 Manual


A&J Vacuum Services offers full repair/service of Pfeiffer Vacuum Pumps, along with all other brands offered on our website. AJVS also services Pfeiffer turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: Remanufactured In Stock
Item#: PN06866 Mfr Part#: A53382946 Manufacturer: Edwards Vacuum
PRICE: $29,450.00
WEB SAVINGS: $8,075.00
YOU PAY: $21,375.00

Edwards iH600 Dry Vacuum Pump, 200-208 V, 50/60 Hz, A53382946

 

Edwards iH 600 Overview:


Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership. The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

The Edwards iH dry pumps offer a highly reliable, low cost pump for difficult processes where particulate, condensable or corrosive by-products are present. The iH series has a five stage base pump with an innovative cantilever rotor, claw and roots design which improves dust handling and reduces exhaust noise. In addition, iH series pumps are fitted with a single stage mechanical booster pump and totally enclosed water cooled motors.

The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.

The iH600 system has an HCDP80 dry pump, with an HCMB600 mechanical booster pump fitted to the inlet of the HCDP80 pump. Both the HCDP and HCMB pumps have enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system.

You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.

 


Click Here for Edwards iH 600 Manual


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: Remanufactured In Stock
Item#: PN06952 Mfr Part#: D37272000 Manufacturer: Edwards Vacuum
PRICE: $725.00
WEB SAVINGS: $75.00
YOU PAY: $650.00

Edwards Dry Pump Remote Control (Gameboy), D37272000

 

Edwards Remote Control Overview:


The End User Controller (EUC) allows manual control of the EPX pump and also displays the pump status.

Use the run button to start the EPX pump. The run button has an LED which is on when the EPX pump is running. Use the stop button to stop the pump.

The display shows two lines of text; each line is 16 characters long. In normal operation, the Normal display is shown; the Normal display has two pages, and each has two lines. Each page of the Normal display shows the status of one or more EPX EUC sensors or internal clocks and counters. As supplied, the first page of Normal display shows the pump serial number and pump current. It is possible to change the information shown on the Normal display.

At any time, press one of the four menu buttons to select a new menu. Then use the up, down , ENTER and CANCEL buttons to move through the menu. The appropriate menu selected LED is on when the corresponding menu is in use.

Use the menu, up, down, CANCEL and ENTER buttons as described below:

  • Status: Press this button to select the Status menu. This menu displays the current pump status.
  • Normal: Press this button to select the Normal display.
  • Control: Press this button to select the Control menu, then take control or release control of the pumping system.
  • Setup: Press this button to select the Setup menu. In this menu it is possible to display parameters (such as the pressure units used when pressures are displayed).
  • Enter (6): Use this button to select a currently displayed menu option or to enter a currently displayed parameter.
  • Cancel (4): Use this button to cancel the currently displayed menu or option and return to the previous menu or
    option.
  • Up (5)/Down (3): Use these buttons to move up or down menu options or to increase or decrease a displayed
    parameter.
  • The status LEDs show the current status of the EPX system.
  • Alarm: This LED shows when an alarm condition exists.
  • Warning: This LED shows when a warning condition exists.
  • Local control: This LED is on when the EUC has control of the EPX system.

The ALARM and WARNING LEDs flash when the corresponding alarm or warning condition first occurs. When acknowledging the condition, the corresponding LED goes on permanently. For most alarms and warnings, if the condition clears (that is, the fault which caused the condition is no longer present), the corresponding LED goes off once the condition has been acknowledged.

 

Edwards Remote Control Front Panel:


Edwards Dry Pump Remote Control (Gameboy), D37272000

 


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: Remanufactured In Stock
Item#: PN14572 Mfr Part#: D37209000 Manufacturer: Edwards Vacuum
PRICE: $0.00
YOU PAY: $1,500.00

Edwards Remote Control (Game boy) To Be Used With The iQDP Semiconductor Pumping System, D37209000, D372-09-000

 

Edwards Remote Control Overview:


The End User Controller (EUC) allows manual control of the EPX pump and also displays the pump status.

Use the run button to start the EPX pump. The run button has an LED which is on when the EPX pump is running. Use the stop button to stop the pump.

The display shows two lines of text; each line is 16 characters long. In normal operation, the Normal display is shown; the Normal display has two pages, and each has two lines. Each page of the Normal display shows the status of one or more EPX EUC sensors or internal clocks and counters. As supplied, the first page of Normal display shows the pump serial number and pump current. It is possible to change the information shown on the Normal display.

At any time, press one of the four menu buttons to select a new menu. Then use the up, down , ENTER and CANCEL buttons to move through the menu. The appropriate menu selected LED is on when the corresponding menu is in use.

Use the menu, up, down, CANCEL and ENTER buttons as described below:

  • Status: Press this button to select the Status menu. This menu displays the current pump status.
  • Normal: Press this button to select the Normal display.
  • Control: Press this button to select the Control menu, then take control or release control of the pumping system.
  • Setup: Press this button to select the Setup menu. In this menu it is possible to display parameters (such as the pressure units used when pressures are displayed).
  • Enter (6): Use this button to select a currently displayed menu option or to enter a currently displayed parameter.
  • Cancel (4): Use this button to cancel the currently displayed menu or option and return to the previous menu or
    option.
  • Up (5)/Down (3): Use these buttons to move up or down menu options or to increase or decrease a displayed
    parameter.
  • The status LEDs show the current status of the EPX system.
  • Alarm: This LED shows when an alarm condition exists.
  • Warning: This LED shows when a warning condition exists.
  • Local control: This LED is on when the EUC has control of the EPX system.

The ALARM and WARNING LEDs flash when the corresponding alarm or warning condition first occurs. When acknowledging the condition, the corresponding LED goes on permanently. For most alarms and warnings, if the condition clears (that is, the fault which caused the condition is no longer present), the corresponding LED goes off once the condition has been acknowledged.

 

Edwards Remote Control Front Panel:


Edwards Dry Pump Remote Control (Gameboy), D37272000

 


A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.


Condition: Remanufactured In Stock
Item#: PN00265 Mfr Part#: ED-QDP40 Manufacturer: Edwards Vacuum
PRICE: $6,408.66
WEB SAVINGS: $125.66
YOU PAY: $6,283.00

Edwards QDP-40 Dry Semiconductor Vacuum Pump

 

Overview:


Edwards QDP-40 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.


Condition: Remanufactured Call us for Availability
Item#: PN00266 Mfr Part#: QDP80 Manufacturer: Edwards Vacuum
PRICE: $8,089.62
WEB SAVINGS: $158.62
YOU PAY: $7,931.00

Edwards QDP-80 Dry Semiconductor Vacuum Pump

 

Edwards QDP-80 Overview:


Edwards QDP-80 Dry Vacuum Pump is a four-stage, positive displacement rotary pump. These "Dry Pumps" are ideal for the corrosive enviroment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.


Condition: Remanufactured Call us for Availability
Item#: PN18161 Mfr Part#: A50588000 Manufacturer: Edwards Vacuum
PRICE: $2,035.00
WEB SAVINGS: $185.00
YOU PAY: $1,850.00

Edwards Vacuum iGX 100L Dry Vacuum Pump Silencer.

  • (2) Clamps and (2) O-rings included

Condition: Demo Out of Stock
Contact
A&J Vacuum Services
16 Somerset Place, Clifton, NJ 07012
Customer Service
Phone: 973-249-0854, Fax: 973-249-0855
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