Ulvac Ulvoil R 7000 Vacuum Pump Oil is synthetic hydrocarbon based vacuum pump oil containing a newly developed aromatic ring for semiconductor processes. This oil provides excellent thermal resistance, oxidation resistance, and chemical resistance.
Compared to petroleum (mineral oil) based pump oil, R-7000 oil is stronger relative to exhaust gases such as NOx O2, O3, and halogen compounds. R-7000 oil has a lifespan of 20 to 30 times greater than mineral oil and is optimized for use in oil-sealed rotary vacuum pumps, that pump special gases.
Although very hard particles enter the pump along with corrosive (active) gases during semiconductor production processes, R-7000 oil has an excellent capability to evenly disperse these particles. A great reduction in the number of oil replacements can therefore be realized
Since R-7000 oil consists of synthetic hydrocarbon with an aromatic ring structure, oil replacement and disposal at the time of overhauls can be handled in the same way as conventional petroleum (mineral oil) based oil.
Ultimate Pressure: < 7 x 10-1 Pa
Color: Light Brown/Transparent
Kinematic Viscosity (40 Degrees Celsius): 68 mm2/s
Kinematic Viscosity (100 Degrees Celsius): 10 mm2/s
Viscosity Index: 110
Water Content: <0.01 Percent
Total Acid Number: <0.01 mg KOH/g
Density: 0.91 g/cm3
A&J Vacuum Repairs / Rebuilds and Services Rotary Vane Vacuum Pumps and other vacuum pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.