The DRYVAC 25P, 50P and 100P are dry-compression vacuum pumps designed especially for semiconductor etching and CVD processes. Pump operating principle DRYVACs are four-stage hook-and-claw vacuum pumps.
The two rotors turn in opposite directions inside the pumping chamber . As they rotate, they open and close the intake (1/5) and outlet slots with each cycle.
The pumping chamber is divided by the rotors. Gas is drawn in on the one side of the rotors and compressed on the other side.
Suction and compression cycle: As the rotors rotate, the sealed space above the rotors is reduced in size and the gas is compressed. At the same time, the right rotor begins opening the inlet slot and gas is drawn into the pumping chamber below the rotors.
There are four pumping stages located one above the other. The stages are pinned together.
The gas enters the pump through the intake port, is pumped through four pump stages, flows through an exhaust silencer, and through a non-return valve into the exhaust. The rotors are driven by two vertical shafts connected to the motor and synchronized by gears.The pumping chamber is free of sealants and lubricants; however , PFPE (perfluoropolyether) is used to lubricate the gearing and the lower bearings. The upper bearings are PFPE-grease lubricated. Piston rings are used to seal each shaft where it passes through the stages. The gear box is isolated from the pumping chamber by piston rings and radial shaft seals. The upper bearings are isolated by shaft seals. The bearings and seals are mounted in the water-cooled upper and lower end plates. The supply of cooling water is regulated by a thermostat. The pump stages are air cooled. The pump is fully enclosed by panels, which can easily be removed for maintenance purposes. An air outlet for cabinet ventilation is on the top of the DRY VAC.
Unit is fully rebuilt and comes with a FULL 12-MONTH WARRANTY!
A&J Vacuum Services offers full repair/service of Leybold 25P, along with all other brands offered on our website. AJVS also services Leybold turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.
The DRYVAC 25P, 50P and 100P are dry-compression vacuum pumps designed especially for semiconductor etching and CVD processes. Pump operating principle DRYVACs are four-stage hook-and-claw vacuum pumps.
The two rotors turn in opposite directions inside the pumping chamber . As they rotate, they open and close the intake (1/5) and outlet slots with each cycle.
The pumping chamber is divided by the rotors. Gas is drawn in on the one side of the rotors and compressed on the other side.
Suction and compression cycle: As the rotors rotate, the sealed space above the rotors is reduced in size and the gas is compressed. At the same time, the right rotor begins opening the inlet slot and gas is drawn into the pumping chamber below the rotors.
There are four pumping stages located one above the other. The stages are pinned together.
The gas enters the pump through the intake port, is pumped through four pump stages, flows through an exhaust silencer, and through a non-return valve into the exhaust. The rotors are driven by two vertical shafts connected to the motor and synchronized by gears.The pumping chamber is free of sealants and lubricants; however , PFPE (perfluoropolyether) is used to lubricate the gearing and the lower bearings. The upper bearings are PFPE-grease lubricated. Piston rings are used to seal each shaft where it passes through the stages. The gear box is isolated from the pumping chamber by piston rings and radial shaft seals. The upper bearings are isolated by shaft seals. The bearings and seals are mounted in the water-cooled upper and lower end plates. The supply of cooling water is regulated by a thermostat. The pump stages are air cooled. The pump is fully enclosed by panels, which can easily be removed for maintenance purposes. An air outlet for cabinet ventilation is on the top of the DRY VAC.
Unit is fully rebuilt and comes with a FULL 12-MONTH WARRANTY!
A&J Vacuum Services offers full repair/service of Leybold 25P, along with all other brands offered on our website. AJVS also services Leybold turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.