- ISO-63 Inlet Flange
- 115 VAC
- P/N L97070301
- 250 Watt Heater
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Agilent AX-65 Diffusion Pump, 115 VAC, ISO-63 Inlet Flange, Standard Cold Cap, 250 Watt Heater, L9670301, AX65 , Air Cooling, Santovac 5 Oil
Condition:
New
Item#:PN22558
Mfr Part#:L9707301
Manufacturer:Agilent Technologies / Varian
Price upon request
CONTACT US
Features:
Agilent AX-65 Diffusion Pump, 115 VAC, ISO-63 Inlet Flange, Standard Cold Cap, 250 Watt Heater, L9670301, AX65, Air Cooling, Santovac 5 Oil, AX65 with Air Cooling Fan
Agilent Technologies Difussion pump model AX-65 is air cooled high vacuum pump with pumping speed at 65 l/sec. air and 90 l/sec He.
Agilent Varian AX pump comes with Fully optimized Jet, Agilent produces vapor jets that deliver the highest throughput, highest pressure stability, and tolerable forline pressure available, while reducing ackstreaming to a absolute minimum.
These AX-65 pump comes with standard KF-16 outlet flange. Large oil level sight glass offers clear view of oil level.
Mounted cooling fan included with each pump (P/N 661300138)
Overtemperature thermal switch set to open at 365°F(182 °C)
Use 250W heater with polyphenyl ether fluids (such as DC-705 and Santovac 5).
Use 200W heater for other fluids.
AX 65 Diffusion Pump Pumping Speed:
-
Air: 65 l/s
-
He: 90 l/s
Operating Range
-
Torr 3x10−3 to <5x10−8
-
Mbar 3.9x10−3 to <6.5x10−8
Throughput (Air), Max. Optimum Range
-
Torr-l/s 0.19
-
Mbar-l/s 0.25
Forepressure, Max. No Load
-
Torr 0.75
-
mbar 1.00
Forepressure, Max. Full Load
-
Torr 0.60
-
mbar 0.78
Backstreaming Rate at Pump Inlet
-
mg/cm2/min <2x10-4
Recommended Backing Pump: > 2.5 m3/hr or 1.5 CFM
Warmup Time: 10 Minutes
Cooldown Time: 10 Minutes (with quick cool coil)
Fluid Charge: 30 cc, Santovac 5 oil is recomended for this Pump
Electrical Requirements: 115 VAC Single Phase, 50/60 Hz
Pump Power: 250 Watts
A&J Vacuum Services, Inc. provides full service and repairs on all AX-65 and VHS pump series.
1. Agilent Varian Jet assembly with top hat and shield for AX-65 Diffusion Pump, L9674301 - PN22534
2. Agilent Varian Cold Cap for AX-65 Diffusion Pump, L9675301 - PN22536
3. Agilent Inlet Baffle AX-65 Diffusion Pump, L9706001, Varian Inlet Baffle - PN22537
4. Agilent Jet Alignment Kit AX-65 Diffusion Pump, L9995301, Varian Jet Alignment Kit - PN22538
5. Agilent Heater Harness 90 VAC, 250 Watt for AX-65 Diffusion Pump, L9994301, Varian Heater Harness for Santovac 5 Oil - PN22539
5. Agilent Heater Harness 115 VAC, 250 Watt for AX-65 Diffusion Pump, L9994303, Varian Heater Harness for Santovac 5 Oil - PN22540
5. Agilent Heater Harness 165 VAC, 250 Watt for AX-65 Diffusion Pump, L9994302, Varian Heater Harness for Santovac 5 Oil - PN22549
5. Agilent Heater Harness 220 VAC, 250 Watt for AX-65 Diffusion Pump, L9994304, Varian Heater Harness for Santovac 5 Oil - PN22550
5. Agilent Heater Harness 115 VAC, 200 Watt for AX-65 Diffusion Pump, L9994307, Varian Heater Harness for CMP 704 Oil - PN22551
5. Agilent Heater Harness 220 VAC, 200 Watt for AX-65 Diffusion Pump, L9994308, Varian Heater Harness for CMP 704 Oil - PN22552
6. Agilent Over Temperature Thermal Switch, Normally Closed for AX-65 Diffusion Pump Heater Harness (Set to open at 365 °F), Varian L9964001 - PN22553
7. Agilent Optional Thermal Switch, Normally Open Pump Ready Switch for AX-65 Diffusion Pump Heater Harness (Set to close at 170 °F), Varian L9964002 - PN22554
8. Agilent Varian Fan, Universal Voltage for AX-65 Diffusion Pump, 115-230 VAC, Fan Only 661300138 - PN22555
9. Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301- PN22556
12. Agilent Varian Bottom Insulation for AX-65 Diffusion Pump, (1 required with heater harness), L9701002 - PN22557
A&J Vacuum also repair / rebuild and service all Agilent Varian AX-65 and VHS Diffusion Vacuum Pumps along with all other Agilent and Varian Turbo Pumps, Varial Scroll Pumps, Agilent scroll Pumps and all other Agilent Vacuum Rotary Vane pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854
This item is non-returnable/non-refundable
Agilent AX-65 Diffusion Pump, 115 VAC, ISO-63 Inlet Flange, Standard Cold Cap, 250 Watt Heater, L9670301, AX65, Air Cooling, Santovac 5 Oil, AX65 with Air Cooling Fan
Diffusion Pump Pumping Speed:
-
Air: 65 l/s
-
He: 90 l/s
Operating Range
-
Torr 3x10−3 to <5x10−8
-
Mbar 3.9x10−3 to <6.5x10−8
Throughput (Air), Max. Optimum Range
-
Torr-l/s 0.19
-
Mbar-l/s 0.25
Forepressure, Max. No Load
-
Torr 0.75
-
mbar 1.00
Forepressure, Max. Full Load
-
Torr 0.60
-
mbar 0.78
Backstreaming Rate at Pump Inlet
-
mg/cm2/min <2x10-4
Recommended Backing Pump: > 2.5 m3/hr or 1.5 CFM
Warmup Time: 10 Minutes
Cooldown Time: 10 Minutes (with quick cool coil)
Fluid Charge: 30 cc
Electrical Requirements: 115 VAC Single Phase, 50/60 Hz
Pump Power: 250 Watts
Mounted cooling fan included with each pump (P/N 661300138)
Overtemperature thermal switch set to open at 365°F(182 °C)
Use 250W heater with polyphenyl ether fluids (such as DC-705 and Santovac 5).
Use 200W heater for other fluids.
1. Agilent Varian Jet assembly with top hat and shield for AX-65 Diffusion Pump, L9674301 - PN22534
2. Agilent Varian Cold Cap for AX-65 Diffusion Pump, L9675301 - PN22536
3. Agilent Inlet Baffle AX-65 Diffusion Pump, L9706001, Varian Inlet Baffle - PN22537
4. Agilent Jet Alignment Kit AX-65 Diffusion Pump, L9995301, Varian Jet Alignment Kit - PN22538
5. Agilent Heater Harness 90 VAC, 250 Watt for AX-65 Diffusion Pump, L9994301, Varian Heater Harness for Santovac 5 Oil - PN22539
5. Agilent Heater Harness 115 VAC, 250 Watt for AX-65 Diffusion Pump, L9994303, Varian Heater Harness for Santovac 5 Oil - PN22540
5. Agilent Heater Harness 165 VAC, 250 Watt for AX-65 Diffusion Pump, L9994302, Varian Heater Harness for Santovac 5 Oil - PN22549
5. Agilent Heater Harness 220 VAC, 250 Watt for AX-65 Diffusion Pump, L9994304, Varian Heater Harness for Santovac 5 Oil - PN22550
5. Agilent Heater Harness 115 VAC, 200 Watt for AX-65 Diffusion Pump, L9994307, Varian Heater Harness for CMP 704 Oil - PN22551
5. Agilent Heater Harness 220 VAC, 200 Watt for AX-65 Diffusion Pump, L9994308, Varian Heater Harness for CMP 704 Oil - PN22552
6. Agilent Over Temperature Thermal Switch, Normally Closed for AX-65 Diffusion Pump Heater Harness (Set to open at 365 °F), Varian L9964001 - PN22553
7. Agilent Optional Thermal Switch, Normally Open Pump Ready Switch for AX-65 Diffusion Pump Heater Harness (Set to close at 170 °F), Varian L9964002 - PN22554
8. Agilent Varian Fan, Universal Voltage for AX-65 Diffusion Pump, 115-230 VAC, Fan Only 661300138 - PN22555
9. Agilent Varian Exhaust Foreline Baffle for AX-65 Diffusion Pump, L9676301- PN22556
12. Agilent Varian Bottom Insulation for AX-65 Diffusion Pump, (1 required with heater harness), L9701002 - PN22557
A&J Vacuum also repair / rebuild and service all Agilent Varian AX-65 and VHS Diffusion Vacuum Pumps along with all other Agilent and Varian Turbo Pumps, Varial Scroll Pumps, Agilent scroll Pumps and all other Agilent Vacuum Rotary Vane pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854
Agilent Varian Diffusion Pump Catalog
AX-65 Diffusion Pump Instruction Manual, AX65, AX 65 diffusion pump manual
Get started with your repair:
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Start your equipment repair process by creating a Service RMA.
High quality service guaranteed
A&J Vacuum Services provides repairs on all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair and Mass Spectrometer repair. Our highly trained technicians will deliver the highest quality service and satisfaction.
We operate at our own full service repair facility which allows us to quickly and economically perform all repairs in a timely manner. Our advandced machinery enables us to handle all facets of the service and repair process. AJVS utilizes industry standard vibration analysis equipment and advanced testing equipment to troubleshoot and minimize all equipment failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
AJVS repair process:
Repair Steps
- Full incoming inspection and run up time check, vibration check, drive inspection.
- Full disassembly of the pump, decontamination and cleaning.
- Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
- Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and log pump life.
- Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10 -Mbar l/s. Vibrations are analyzed and test data is digitally recorded.
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Clifton, NJ 07012
Clifton, NJ 07012
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Phone: 973-249-0854,
Fax: 973-249-0855
Fax: 973-249-0855
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