- OEM Parts
When an oil rotary pump is started at atmospheric pressure, and operated during low vacuum operation, the pump oil is exhausted along with the exhaust gas that is being pumped. This oil-laden exhaust mist, which consists of tiny oil droplets, appears as "smoke" exiting from the exhaust port of the pump. The TM and TMX series oil mist traps help to ensure a clean working environment and protect indoor equipment from contamination that would otherwise be caused by this oil mist.
When trapped oil is returned directly to the main pumping unit and reused, the filter lifespan is decreased and pump problems may occur. Since recovery of the trapped oil is dependent on pump operating conditions, please consult Ulvac for advice about your particular pumping task and to help ensure the correct match of components for your application.
Replacing the filter cartridge is simple. An adapter is required when changing filters of old TM-3, 4, and 4S models to cartridge filters.
Be sure to use an oil mist trap that is appropriately sized to match the pumping speed of the pump and the volume of the chamber which is being evacuated.
Adapter is required when attaching to PVD-180(B), PVD-360(B), VD151, VD201, VD601, and VD901.
Oil recovery cannot be used with TMX-1 and TMX-2 models.
Conversion to a cartridge filter is not possible for TMX-1, TMX-2, and TM-2 (old model) units.
Standard : Umbrella type; F : Flange type.
Values in ( ) indicate mass with flange attached.
Low load models should have a cntinuous suction Pressure.
High load models should have a continuous suction pressure of 100kPa or less.
| Model | Attachment flange *1 | Vacuum pump used | Weight(kg) | Material |
| TMX-1 | Special flange/ G1 1/2 |
PVD-180(B) *2 PVD-360(B) VD151 VD201 |
1.1 | Trap : Mild steel (SPCC) Filter : Glass wool |
| TM201 | VF40/G 1・1/2 | VD301 (for low loads)*5 VD401 (for low loads) |
8.5 | |
| TM401 | VF40/G 1・1/2 | VD301 (for high loads) *6 VD401 (for high loads) VD601 (for low loads) VD901 (for low loads) |
10 | |
| TM-2 (standard, F) *3 |
VG50/G2, VG50 (for PKS-016) VF40/G2, VG50 (for VD601/VD901) |
PKS-016 VD601 (for high loads)*2 VD901 (for high loads) |
5.7(6.2) *4 | |
| TM-3 (standard, F)
|
VG80/G3, VG80 (for PKS-030) VF50\G3, VG80 (for VS1501) |
PKS-030 VS1501 |
10(11.5)*4 | |
| TM-4 (standard, F) |
VG100/G4, VG100 8for PKS-070) VF50/G4, VG100 (for VS2401) |
PKS-070 VS2401 |
23.5(25)*4 | |
| TM-4S | VG100/VG100 (for PKS-070) VF50/VG100 (for VS2401) |
PKS-070 (for high loads) VS2401 (for high loads) |
59 |
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A&J Vacuum Services provides repairs on all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair and Mass Spectrometer repair. Our highly trained technicians will deliver the highest quality service and satisfaction.
We operate at our own full service repair facility which allows us to quickly and economically perform all repairs in a timely manner. Our advandced machinery enables us to handle all facets of the service and repair process. AJVS utilizes industry standard vibration analysis equipment and advanced testing equipment to troubleshoot and minimize all equipment failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.