Edwards EPX-500L Dry Vacuum Pump, epx500l

Edwards EPX-500L (EPX 500L) (EPX500L) Dry Vacuum Pump, epx500l

Edwards EPX-500L Overview:

The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.

Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.

Edwards EPX-500L Technology:

The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated.

The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must be provided commensurate with environmental conditions (humidity and temperature) such that the dewpoint is not reached.

The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again.

The EPX L series of pumps cannot be manually operated; they must be controlled and monitored by external control equipment, which must be connected to the EPX pump through the Tool Interface Module (TIM).

The EPX pump is supported by four vibration isolators.

Pump protection sensors automatically shut down the pump if a fault condition arises.

Edwards EPX-500L Applications:

The EPX series covers a broad range of applications from wafer handling through to medium duty processes.

The EPX ‘L’ Series has been designed for use clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface.

Unit is fully rebuilt and comes with a FULL 12-MONTH WARRANTY!