Edwards iH-1800 Dry Vacuum Pump, ih1800

Condition: Remanufactured

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Item#:PN06868

Mfr Part#:ih1800

Manufacturer:Edwards Vacuum

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Remanufactured Edwards iH-1800 (iH 1800) (iH1800) Dry Vacuum Pump, ih1800

Features:

Overview
Manuals
Service & Repair

Edwards iH-1800 (iH 1800) (iH1800) Dry Vacuum Pump, ih1800

Edwards iH-1800 Overview:

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

Edwards iH-1800 Technology:

The iH system operates at pressures between atmospheric and ultimate vacuum with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil into the system being evacuated.

The iH1800 system has an HCDP160 dry pump with an HMB1800 mechanical booster pump fitted to the inlet of the HCDP160 pump. Both the HCDP and HMB pumps have enclosed, water-cooled motors. The iH system is therefore suitable for applications in clean environments where fan cooling of motors is unacceptable.

The iH system has a gas system which introduces purge gas into the HCDP pump. This gas system is suitable for use on harsh duty processes. If you use the iH system on light or medium duty processes, you can use the economiser gas mode to reduce the consumption of purge nitrogen by the pumping system.

You can manually control the iH system through the Pump Display Terminal. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module accessory, or through an iH Communications Module accessory, or you can use the iH Single Pumpset Monitor accessory to control the operation of the iH system.

Edwards iH-1800 Applications:

Load Lock
Transfer
Metrology
Lithography
PVD Process
PVD Pre-clean
RTA
Strip/Ashing
Etching
Implant Source
HDP CVD
RTP
SACVD
MCVD
PECVD
LPCVD
ALD

Unit is fully rebuilt and comes with a FULL 12-MONTH WARRANTY!

A&J Vacuum Services offers full repair/service of Edwards Vacuum Pumps, along with all other brands offered on our website. AJVS also services Edwards turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.

This item is non-returnable/non-refundable

Edwards_IPX_100_180_500_Dry_Vacuum_Manual.pdf

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High quality service guaranteed

A&J Vacuum Services provides repairs on all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair and Mass Spectrometer repair. Our highly trained technicians will deliver the highest quality service and satisfaction.

We operate at our own full service repair facility which allows us to quickly and economically perform all repairs in a timely manner. Our advandced machinery enables us to handle all facets of the service and repair process. AJVS utilizes industry standard vibration analysis equipment and advanced testing equipment to troubleshoot and minimize all equipment failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.

AJVS repair process:

Repair Steps

Full incoming inspection and run up time check, vibration check, drive inspection.
Full disassembly of the pump, decontamination and cleaning.
Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and log pump life.
Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10 -Mbar l/s. Vibrations are analyzed and test data is digitally recorded.

We can repair your: