Fully Refurbished Leybold / Oerlikon 25P Dry Vacuum Pump, 25p, r

The DRYVAC 25P, 50P and 100P are dry-compression vacuum pumps designed especially for semiconductor etching and CVD processes. Pump operating principle DRYVACs are four-stage hook-and-claw vacuum pumps.

Operation:

The two rotors turn in opposite directions inside the pumping chamber . As they rotate, they open and close the intake (1/5) and outlet slots with each cycle.

The pumping chamber is divided by the rotors. Gas is drawn in on the one side of the rotors and compressed on the other side.

Suction and compression cycle: As the rotors rotate, the sealed space above the rotors is reduced in size and the gas is compressed. At the same time, the right rotor begins opening the inlet slot and gas is drawn into the pumping chamber below the rotors.

Design:

There are four pumping stages located one above the other. The stages are pinned together.

The gas enters the pump through the intake port, is pumped through four pump stages, flows through an exhaust silencer, and through a non-return valve into the exhaust. The rotors are driven by two vertical shafts connected to the motor and synchronized by gears.The pumping chamber is free of sealants and lubricants; however , PFPE (perfluoropolyether) is used to lubricate the gearing and the lower bearings. The upper bearings are PFPE-grease lubricated. Piston rings are used to seal each shaft where it passes through the stages. The gear box is isolated from the pumping chamber by piston rings and radial shaft seals. The upper bearings are isolated by shaft seals. The bearings and seals are mounted in the water-cooled upper and lower end plates. The supply of cooling water is regulated by a thermostat. The pump stages are air cooled. The pump is fully enclosed by panels, which can easily be removed for maintenance purposes. An air outlet for cabinet ventilation is on the top of the DRY VAC.

Unit is fully rebuilt and comes with a FULL 12-MONTH WARRANTY!

AJVS can Repair and Service your Leybold / Oerlikon 25P Dry Vacuum Pump. Please visit our Service Page for more information.