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Leybold Dryvac 25P Semiconductor Pump
Condition:
Remanufactured
Call us for Availability
Item#:PN00263
Mfr Part#:Leyb-25P
Manufacturer:Leybold
Price upon request
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Features:
Leybold DRYVAC 25P (25-P) (25 P) Dry Vacuum Pump, 25p
Leybold DRYVAC 25P Overview:
The DRYVAC 25P, 50P and 100P are dry-compression vacuum pumps designed especially for semiconductor etching and CVD processes. Pump operating principle DRYVACs are four-stage hook-and-claw vacuum pumps.
Leybold DRYVAC 25P Operation:
The two rotors turn in opposite directions inside the pumping chamber . As they rotate, they open and close the intake (1/5) and outlet slots with each cycle.
The pumping chamber is divided by the rotors. Gas is drawn in on the one side of the rotors and compressed on the other side.
Suction and compression cycle: As the rotors rotate, the sealed space above the rotors is reduced in size and the gas is compressed. At the same time, the right rotor begins opening the inlet slot and gas is drawn into the pumping chamber below the rotors.
Leybold DRYVAC 25P Design:
There are four pumping stages located one above the other. The stages are pinned together.
The gas enters the pump through the intake port, is pumped through four pump stages, flows through an exhaust silencer, and through a non-return valve into the exhaust. The rotors are driven by two vertical shafts connected to the motor and synchronized by gears.The pumping chamber is free of sealants and lubricants; however , PFPE (perfluoropolyether) is used to lubricate the gearing and the lower bearings. The upper bearings are PFPE-grease lubricated. Piston rings are used to seal each shaft where it passes through the stages. The gear box is isolated from the pumping chamber by piston rings and radial shaft seals. The upper bearings are isolated by shaft seals. The bearings and seals are mounted in the water-cooled upper and lower end plates. The supply of cooling water is regulated by a thermostat. The pump stages are air cooled. The pump is fully enclosed by panels, which can easily be removed for maintenance purposes. An air outlet for cabinet ventilation is on the top of the DRY VAC.
Unit is fully rebuilt and comes with a FULL 12-MONTH WARRANTY!
A&J Vacuum Services offers full repair/service of Leybold 25P, along with all other brands offered on our website. AJVS also services Leybold turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
This item is non-returnable/non-refundable
Get started with your repair:
We can have a repair estimate ready for your equipment within the hour of submission.
Start your equipment repair process by creating a Service RMA.
High quality service guaranteed
A&J Vacuum Services provides repairs on all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair and Mass Spectrometer repair. Our highly trained technicians will deliver the highest quality service and satisfaction.
We operate at our own full service repair facility which allows us to quickly and economically perform all repairs in a timely manner. Our advandced machinery enables us to handle all facets of the service and repair process. AJVS utilizes industry standard vibration analysis equipment and advanced testing equipment to troubleshoot and minimize all equipment failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
AJVS repair process:
Repair Steps
- Full incoming inspection and run up time check, vibration check, drive inspection.
- Full disassembly of the pump, decontamination and cleaning.
- Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
- Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and log pump life.
- Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10 -Mbar l/s. Vibrations are analyzed and test data is digitally recorded.
We can repair your:
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- Dry Vacuum Pumps
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- Diaphragm Dry Pumps
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Contact
A&J Vacuum Services
16 Somerset Place,
Clifton, NJ 07012
Clifton, NJ 07012
Customer Service
Phone: 973-249-0854,
Fax: 973-249-0855
Fax: 973-249-0855
Service Hours
8:00am to 5:00pm,
Monday thru Friday EST
Monday thru Friday EST
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