- PN 1013709
- Ultimate Pressure: < 7 x 10-1 Pa
- Viscosity Index: 110
- Density: 0.91 g/cm3
Overview
Ulvac Ulvoil R 7000 Vacuum Pump Oil is synthetic hydrocarbon based vacuum pump oil containing a newly developed aromatic ring for semiconductor processes. This oil provides excellent thermal resistance, oxidation resistance, and chemical resistance.
Compared to petroleum (mineral oil) based pump oil, R-7000 oil is stronger relative to exhaust gases such as NOx O2, O3, and halogen compounds. R-7000 oil has a lifespan of 20 to 30 times greater than mineral oil and is optimized for use in oil-sealed rotary vacuum pumps, that pump special gases.
Although very hard particles enter the pump along with corrosive (active) gases during semiconductor production processes, R-7000 oil has an excellent capability to evenly disperse these particles. A great reduction in the number of oil replacements can therefore be realized
Since R-7000 oil consists of synthetic hydrocarbon with an aromatic ring structure, oil replacement and disposal at the time of overhauls can be handled in the same way as conventional petroleum (mineral oil) based oil.
Ultimate Pressure: < 7 x 10-1 Pa
Color: Light Brown/Transparent
Kinematic Viscosity (40 Degrees Celsius): 68 mm2/s
Kinematic Viscosity (100 Degrees Celsius): 10 mm2/s
Viscosity Index: 110
Water Content: <0.01 Percent
Total Acid Number: <0.01 mg KOH/g
Density: 0.91 g/cm3
A&J Vacuum Repairs / Rebuilds and Services Rotary Vane Vacuum Pumps and other vacuum pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.
Technical Data
Ultimate Pressure: < 7 x 10-1 Pa
Color: Light Brown/Transparent
Kinematic Viscosity (40 Degrees Celsius): 68 mm2/s
Kinematic Viscosity (100 Degrees Celsius): 10 mm2/s
Viscosity Index: 110
Water Content: <0.01 Percent
Total Acid Number: <0.01 mg KOH/g
Density: 0.91 g/cm3
HTS Code; 2710.19.3080
A&J Vacuum Repairs / Rebuilds and Services Rotary Vane Vacuum Pumps and other vacuum pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.
We can have a repair estimate ready for your equipment within the hour of submission.
Start your equipment repair process by creating a Service RMA.
A&J Vacuum Services provides repairs on all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair and Mass Spectrometer repair. Our highly trained technicians will deliver the highest quality service and satisfaction.
We operate at our own full service repair facility which allows us to quickly and economically perform all repairs in a timely manner. Our advandced machinery enables us to handle all facets of the service and repair process. AJVS utilizes industry standard vibration analysis equipment and advanced testing equipment to troubleshoot and minimize all equipment failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.