- PN X3502-64010
- Inlet Flange: ISO 63
- Rotational Speed: 81000 rpm
- Pumping Speed: 67 l/s
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Agilent TwisTorr 84 FS Turbo Pump with ISO 63 Inlet Flange, 67 l/sec Pumping Speed, X3502-64010, X350264010
Condition:
Remanufactured
Call us for Availability
Item#:PN22835
Mfr Part#:X3502-64010, X350264010
Manufacturer:Agilent Technologies / Varian
Price upon request
CONTACT US
Features:
Agilent TwisTorr 84 FS Turbo Pump with ISO 63 Inlet Flange, 67 l/sec Pumping Speed, X3502-64010, X350264010
The Agilent Technologies TwisTorr 84 FS is a turbomolecular pump for high and ultra-high vacuum applications. The TwisTorr 84 FS is equipped with new and improved bearings and its TwisTorr drag state technology enables high compression of gases such as Helium and Hydrogen. The TwisTorr 84 FS is designed to pump any type of non corrosive gas and can be used with a smaller backing pump (5 m3/h).
The Agilent Varian TwisTorr 84 FS pumping action is obtained through a high speed turbine (max. 81000 rpm) driven by a high performance 3-phase electric motor. The TwisTorr 84 FS is free of contaminating agents and, therefore, is suitable for applications requiring a "clean" vacuum.
The TwisTorr 84 FS pump consists of a high frequency motor and a high-strength aluminum alloy turbine fitted with 9 bladed stages and 3 TwisTorr drag stages which are in the form of four disks. The turbine rotates counterclockwise when viewed from the high vacuum flange end. The TwisTorr 84 FS rotor is supported by permanently lubricated ceramic ball bearings. The static blades are precisely situated with the help of spacer rings and are made of stainless steel. The TwisTorr stators are in the form of machined disks with parallel spiral pumping channels. During normal operation, the motor is fed with a voltage of 54 Vac three-phase at 1350 Hz.
The Agilent TwisTorr 84 FS turbomolecular pump can be water cooled or air cooled. In order to prevent the pump from overheating, a thermistor sensor is mounted near the upper bearing.
Agilent Technologies TwisTorr 84FS ISO 63, X3502-64010, X350264000, Turbo Pump Dimensions
Agilent Technologies TwisTorr 84FS Turbo Pump
Pumping Speed vs. Inlet Pressure
Agilent Technologies TwisTorr 84 FS Turbo Pump Applications
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Mass Spectrometry and Analytical Instrumentation, including GC/MS, LC/MS, ICP-MS, TOF.
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Vacuum in Research and Development, including high energy physics, fusion technology, general research.
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Industrial Vacuum Processing, including thin film deposition, device processing, and general processes such as vacuum furnaces.
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Nanotechnology Instrumnets, including electron microscopy, focused ion beam systems, surface analysis, semiconductor manufacturing.
Please click here to view operating instructions for Agilent Varian TwisTorr 84 FS Turbo Pump.
Please click here to learn more about the Agilent Varian TwissTorr Turbo Pump Family and view Agilent Technologies TwissTorr Brochure.
A&J Vacuum repairs / rebuilds and services all Agilent TwisTorr Turbo Pumps, including Agilent TwissTorr 304 FS, Agilent TwisTorr 84 FS, along with all other Varian, Alcatel, Edwards, Bush, Leybold, Pfeiffer, Ulvac Turbo Pumps, and Turbo Pump Systems. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.
Agilent TwisTorr 84 FS Turbo Pump with ISO 63 Inlet Flange, 67 l/sec Pumping Speed, X3502-64010, X350264010
A&J Vacuum repairs / rebuilds and services all Agilent TwisTorr Turbo Pumps, including Agilent TwissTorr 304 FS, Agilent TwisTorr 84 FS, along with all other Varian, Alcatel, Edwards, Bush, Leybold, Pfeiffer, Ulvac Turbo Pumps, and Turbo Pump Systems. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.
Get started with your repair:
We can have a repair estimate ready for your equipment within the hour of submission.
Start your equipment repair process by creating a Service RMA.
High quality service guaranteed
A&J Vacuum Services provides repairs on all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair and Mass Spectrometer repair. Our highly trained technicians will deliver the highest quality service and satisfaction.
We operate at our own full service repair facility which allows us to quickly and economically perform all repairs in a timely manner. Our advandced machinery enables us to handle all facets of the service and repair process. AJVS utilizes industry standard vibration analysis equipment and advanced testing equipment to troubleshoot and minimize all equipment failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
AJVS repair process:
Repair Steps
- Full incoming inspection and run up time check, vibration check, drive inspection.
- Full disassembly of the pump, decontamination and cleaning.
- Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
- Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and log pump life.
- Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10 -Mbar l/s. Vibrations are analyzed and test data is digitally recorded.
We can repair your:
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Contact
A&J Vacuum Services
16 Somerset Place,
Clifton, NJ 07012
Clifton, NJ 07012
Customer Service
Phone: 973-249-0854,
Fax: 973-249-0855
Fax: 973-249-0855
Service Hours
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Monday thru Friday EST
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