The Pfeiffer HiPace 2800 IUT is a 90° – 180° bottom mounting turbo pump that is ideal for ion implantation systems. The pumping speed is optimized for light gases and the nickel-plated rotor guarantees resistivity to the dopants used in your process. The intelligent temperature management system reduces process condensation and deposits. The HiPace 2800IUT also has Semi S2 and UL/CSA certification.
A&J Vacuum Services offers full repair/service of Pfeiffer Vacuum Pumps, along with all other brands offered on our website. AJVS also services Pfeiffer turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
| Bearing | Hybrid |
| Compression ratio for Ar | > 1 · 108 |
| Compression ratio for H2 | 4 · 103 |
| Compression ratio for He | 6 · 104 |
| Compression ratio for N2 | > 1 · 108 |
| Connection flange | DN 250 ISO-F / DN 40 ISO-KF |
| Connection flange (in) | DN 250 ISO-F |
| Connection flange (out) | DN 40 ISO-KF |
| Cooling method | Water |
| Cooling water connection | In/Out: G 1/4'' |
| Cooling water flow | 100 l/h |
| Cooling water temperature | 15 – 25 °C | 59 – 77 °F | 288.15 – 298.15 K |
| Current, max. | 10 A |
| Electronic drive unit | TC 1200 |
| Emission sound pressure level (EN ISO 2151) | <50 dB(A) |
| Fore-vacuum max. for N2 | 0.8 hPa | 0.6 Torr | 0.8 mbar |
| Gas throughput at 0.1 hPa HV pressure for Ar | > 32 hPa·l/s |
| Gas throughput at 0.1 hPa HV pressure for H2 | 42 hPa·l/s |
| Gas throughput at 0.1 hPa HV pressure for He | 62 hPa·l/s |
| Gas throughput at 0.1 hPa HV pressure for N2 | > 50 hPa·l/s |
| Gas throughput at final rotational speed for Ar | 12 hPa·l/s |
| Gas throughput at final rotational speed for H2 | 75 hPa·l/s |
| Gas throughput at final rotational speed for He | 24 hPa·l/s |
| Gas throughput at final rotational speed for N2 | 18 hPa·l/s |
| Gas throughput at maximum rotation speed for Ar, heated pump at 65 °C | 9 hPa·l/s |
| Gas throughput at maximum rotation speed for Ar, heated pump at 75 °C | 6 hPa·l/s |
| Gas throughput at maximum rotation speed for H2, heated pump at 65 °C | 30 hPa·l/s |
| Gas throughput at maximum rotation speed for H2, heated pump at 75 °C | 18 hPa·l/s |
| Gas throughput at maximum rotation speed for N2, heated pump at 65 °C | 13 hPa·l/s |
| Gas throughput at maximum rotation speed for N2, heated pump at 75 °C | 7 hPa·l/s |
| I/O interfaces | E74, RS-485 |
| Input voltage(s) | 208 – 240 V AC (±10 %), 50/60 Hz |
| Integral leak rate | 1 · 10-8 Pa m³/s | 7.5 · 10-8 Torr l/s | 1 · 10-7 mbar l/s |
| Mains frequency compatibility | 50 Hz 60 Hz |
| Mounting orientation | 90° – 180° (HV flange bottom) |
| Permissible radial magnetic field max. | 3.4 mT |
| Position of power supply pack | Integrated power supply pack |
| Power consumption heating sleeve, max. | 1100 W |
| Power consumption max. | 1350 VA |
| Protection degree | IP20 Type 1 |
| Pumping principle | Dry |
| Pumping speed | 7560 – 10440 m³/h | 4,449.82 – 6,144.98 cfm | 126,000.25 – 174,000.35 l/min |
| Pumping speed for Ar | 2100 l/s |
| Pumping speed for H2 | 2600 l/s |
| Pumping speed for He | 2900 l/s |
| Pumping speed for N2 | 2300 l/s |
| Rotation speed variable | 50 – 100 % |
| Rotation speed ±2 % | 27300 rpm | 27,300 min-1 |
| Run-up time | 8.6 min |
| Type of electronic drive unit installation | Integrated electronic drive unit |
| Ultimate pressure | < 1 · 10-7 hPa | < 7.5 · 10-8 Torr | < 1 · 10-7 mbar |
| Venting connection | G 1/8" |
| Weight | 62 kg | 136.69 lb |
A&J Vacuum Services offers full repair/service of Pfeiffer Vacuum Pumps, along with all other brands offered on our website. AJVS also services Pfeiffer turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
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Service and Repair A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.
Overview
The Pfeiffer HiPace 2800 IUT is a 90° – 180° bottom mounting turbo pump that is ideal for ion implantation systems. The pumping speed is optimized for light gases and the nickel-plated rotor guarantees resistivity to the dopants used in your process. The intelligent temperature management system reduces process condensation and deposits. The HiPace 2800IUT also has Semi S2 and UL/CSA certification.
A&J Vacuum Services offers full repair/service of Pfeiffer Vacuum Pumps, along with all other brands offered on our website. AJVS also services Pfeiffer turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
Specifications
| Bearing | Hybrid |
| Compression ratio for Ar | > 1 · 108 |
| Compression ratio for H2 | 4 · 103 |
| Compression ratio for He | 6 · 104 |
| Compression ratio for N2 | > 1 · 108 |
| Connection flange | DN 250 ISO-F / DN 40 ISO-KF |
| Connection flange (in) | DN 250 ISO-F |
| Connection flange (out) | DN 40 ISO-KF |
| Cooling method | Water |
| Cooling water connection | In/Out: G 1/4'' |
| Cooling water flow | 100 l/h |
| Cooling water temperature | 15 – 25 °C | 59 – 77 °F | 288.15 – 298.15 K |
| Current, max. | 10 A |
| Electronic drive unit | TC 1200 |
| Emission sound pressure level (EN ISO 2151) | <50 dB(A) |
| Fore-vacuum max. for N2 | 0.8 hPa | 0.6 Torr | 0.8 mbar |
| Gas throughput at 0.1 hPa HV pressure for Ar | > 32 hPa·l/s |
| Gas throughput at 0.1 hPa HV pressure for H2 | 42 hPa·l/s |
| Gas throughput at 0.1 hPa HV pressure for He | 62 hPa·l/s |
| Gas throughput at 0.1 hPa HV pressure for N2 | > 50 hPa·l/s |
| Gas throughput at final rotational speed for Ar | 12 hPa·l/s |
| Gas throughput at final rotational speed for H2 | 75 hPa·l/s |
| Gas throughput at final rotational speed for He | 24 hPa·l/s |
| Gas throughput at final rotational speed for N2 | 18 hPa·l/s |
| Gas throughput at maximum rotation speed for Ar, heated pump at 65 °C | 9 hPa·l/s |
| Gas throughput at maximum rotation speed for Ar, heated pump at 75 °C | 6 hPa·l/s |
| Gas throughput at maximum rotation speed for H2, heated pump at 65 °C | 30 hPa·l/s |
| Gas throughput at maximum rotation speed for H2, heated pump at 75 °C | 18 hPa·l/s |
| Gas throughput at maximum rotation speed for N2, heated pump at 65 °C | 13 hPa·l/s |
| Gas throughput at maximum rotation speed for N2, heated pump at 75 °C | 7 hPa·l/s |
| I/O interfaces | E74, RS-485 |
| Input voltage(s) | 208 – 240 V AC (±10 %), 50/60 Hz |
| Integral leak rate | 1 · 10-8 Pa m³/s | 7.5 · 10-8 Torr l/s | 1 · 10-7 mbar l/s |
| Mains frequency compatibility | 50 Hz 60 Hz |
| Mounting orientation | 90° – 180° (HV flange bottom) |
| Permissible radial magnetic field max. | 3.4 mT |
| Position of power supply pack | Integrated power supply pack |
| Power consumption heating sleeve, max. | 1100 W |
| Power consumption max. | 1350 VA |
| Protection degree | IP20 Type 1 |
| Pumping principle | Dry |
| Pumping speed | 7560 – 10440 m³/h | 4,449.82 – 6,144.98 cfm | 126,000.25 – 174,000.35 l/min |
| Pumping speed for Ar | 2100 l/s |
| Pumping speed for H2 | 2600 l/s |
| Pumping speed for He | 2900 l/s |
| Pumping speed for N2 | 2300 l/s |
| Rotation speed variable | 50 – 100 % |
| Rotation speed ±2 % | 27300 rpm | 27,300 min-1 |
| Run-up time | 8.6 min |
| Type of electronic drive unit installation | Integrated electronic drive unit |
| Ultimate pressure | < 1 · 10-7 hPa | < 7.5 · 10-8 Torr | < 1 · 10-7 mbar |
| Venting connection | G 1/8" |
| Weight | 62 kg | 136.69 lb |
A&J Vacuum Services offers full repair/service of Pfeiffer Vacuum Pumps, along with all other brands offered on our website. AJVS also services Pfeiffer turbo pumps and rotary vane pumps. Please contact us for information about our service and repair program or click http://www.ajvs.com/service.php to access our services page. We also offer emergency service upon request. For more information, please email A&J Vacuum Services at info@ajvs.com or call (973) 249-0854. Thank you for choosing AJVS as your supplier.
Spare Parts
Accessories
Service & Repair
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.