- Fully Remanufactured
- P/N PM P02 468
- Inlet Flange DN 200-ISO-K
- Outlet Flange DN 40-KF
This TMH1600PC / P/N PM P02 469 Turbo Pump has a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side.
This Pfeiffer TMH-1600PC was installed on Novellus CVD system, PMK01740, PM K01 740.
The Pfeiffer Turbo Pumps TMH-1600PC and TMU-1600PC models are identical in terms of design. They only differ in their intake flange. The pumps have a free of wear permanent magnetic bearing at high vacuum side and oil lubricated ceramic bearing at the backing side. Turbo pump designed for a wide range of applications in research industry.
Complete Operating Instruction for TMH 1600 PC PM P02 469 is available in PDF format below.
A&J Vacuum repair / rebuild and service Pfeiffer TMH-1600PC Turbo Pumps, Pfeiffer Backing Pumps along with all other Pfeiffer Vacuum Pumps and all other Pfeiffer Leak Detector Service and repair. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.

A&J Vacuum repair / rebuild and service Pfeiffer TMH-1600PC Turbo Pumps, Pfeiffer Backing Pumps along with all other Pfeiffer Vacuum Pumps and all other Pfeiffer Leak Detector Service and repair. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854.
We can have a repair estimate ready for your equipment within the hour of submission.
Start your equipment repair process by creating a Service RMA.
A&J Vacuum Services provides repairs on all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair and Mass Spectrometer repair. Our highly trained technicians will deliver the highest quality service and satisfaction.
We operate at our own full service repair facility which allows us to quickly and economically perform all repairs in a timely manner. Our advandced machinery enables us to handle all facets of the service and repair process. AJVS utilizes industry standard vibration analysis equipment and advanced testing equipment to troubleshoot and minimize all equipment failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.