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Edwards EPX-500L (EPX 500L) (EPX500L) Dry Vacuum Pump, epx500l
Edwards EPX-500L Overview:
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.
Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.
Edwards EPX-500L Technology:
The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated.
The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must be provided commensurate with environmental conditions (humidity and temperature) such that the dewpoint is not reached.
The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again.
The EPX L series of pumps cannot be manually operated; they must be controlled and monitored by external control equipment, which must be connected to the EPX pump through the Tool Interface Module (TIM).
The EPX pump is supported by four vibration isolators.
Pump protection sensors automatically shut down the pump if a fault condition arises.
Edwards EPX-500L Applications:
The EPX series covers a broad range of applications from wafer handling through to medium duty processes.
The EPX ‘L’ Series has been designed for use clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface.
Unit is fully rebuilt and comes with a FULL 12-MONTH WARRANTY!
Edwards_iL_70_600_Dry_Vacuum_Manual.pdf 
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Service and Repair - Turbo Pumps
- Rotary Vane Pumps
- Dry Vacuum Pumps
- Leak Detectors
- Scroll Dry Pumps
- Vacuum Boosters
- Diaphragm Dry Pumps
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
- Full incoming inspection and run up time check, vibration check, drive inspection.
- Full disassembly, decontamination and cleaning.
- Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
- Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and long pump life.
- Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10-9 Mbar l/s. Vibrations are analyzed and test data is digitally recorded.
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.
Overview
Edwards EPX-500L (EPX 500L) (EPX500L) Dry Vacuum Pump, epx500l
Edwards EPX-500L Overview:
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.
Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.
Edwards EPX-500L Technology:
The EPX pump system operates at pressures between atmospheric and ultimate vacuum, with no lubricating or sealing fluid in the pumping chamber. This ensures a clean pumping system without back-migration of oil or fluid into the system being evacuated.
The stator of the pump and the enclosed motor are cooled by an integrated water cooling circuit. The EPX pump is therefore suitable for applications in cleanroom environments where fan cooling is unacceptable. The cooling water supply and return pipelines are connected to the pump by water connectors (customer specified). Cooling water must be provided commensurate with environmental conditions (humidity and temperature) such that the dewpoint is not reached.
The pump incorporates an EMC supply filter and an inverter drive, which provides and controls the electrical supply to the pump-motor. LEDs on the front cover identify the status of the EPX pump. Motor speed depends on the pressure at the pump inlet. When the pump is started with the inlet pressure at or close to atmospheric pressure, the motor accelerates to a speed which is limited by the current which can be supplied by the inverter drive. As the pressure at the inlet is reduced, the motor speed increases, until it eventually reaches its preset maximum speed. If the pressure at the inlet increases, the motor will slow down again.
The EPX L series of pumps cannot be manually operated; they must be controlled and monitored by external control equipment, which must be connected to the EPX pump through the Tool Interface Module (TIM).
The EPX pump is supported by four vibration isolators.
Pump protection sensors automatically shut down the pump if a fault condition arises.
Edwards EPX-500L Applications:
The EPX series covers a broad range of applications from wafer handling through to medium duty processes.
The EPX ‘L’ Series has been designed for use clean duty applications pumping inert gas mixtures, such as loadlock, whereby control is provided by the process tool interface.
Unit is fully rebuilt and comes with a FULL 12-MONTH WARRANTY!
Service & Repair
- Turbo Pumps
- Rotary Vane Pumps
- Dry Vacuum Pumps
- Leak Detectors
- Scroll Dry Pumps
- Vacuum Boosters
- Diaphragm Dry Pumps
A & J Vacuum Services provides repair service for all types of High Vacuum equipment. We perform Turbomolecular Pump repair, Turbo Pump Repair, Dry Pump repair, Vacuum Pump repair, Mass Spectrometer repair, Rotary Vane Pump repair, Vacuum Booster repair, and Leak detector repair. Our highly trained technicians have years of experience and guarantee the highest quality service.
We operate at our own full service repair facility in Clifton, NJ. We have invested in state-of-the-art equipment including; complete line of decontamination, cleaning, drying, balancing, vibration analysis and software to minimize failures. Our in-house machine shop is capable of machining various components, prototypes and housing conversions as needed.
We support all major manufacturers including Pfeiffer Vacuum, Alcatel / Adixen, Edwards Vacuum, Varian, Oerlikon / Leybod Vacuum, Vacuubrand, and Agilent Technologies.
Repair Steps
- Full incoming inspection and run up time check, vibration check, drive inspection.
- Full disassembly, decontamination and cleaning.
- Pump is balanced utilizing state-of-the-art equipment from the world leader in equipment balancing and analysis to reduce noise and vibrations and extend bearings life.
- Assembly and replacement of all necessary parts such as shafts, bushings, bearings, sleeves, O-rings, gaskets, seals, wicks, etc. Only parts that meet or surpass OEM specifications are used to ensure dependable highest quality service and long pump life.
- Final test and leak check. The pump in fully assembled condition is checked for vacuum seal. Leak test to 1 x 10-9 Mbar l/s. Vibrations are analyzed and test data is digitally recorded.
Every pump and instrument is extensively tested for 48 hours. During our final tests, we monitor total pressure, temperature, vibration and noise level utilizing newest testing technologies and techniques specified by OEM. Upon request, we can provide our customers with a pump down graph. Call us for your free repair estimate at 1-973-249-0854.
